Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

20 2110 20 21Direct Operated Precision Regulator (For Special Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: Y (Upward Facing Knob), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: Upward Facing Knob, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

VFS

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

This is a legacy product, and replaced byAW20-N02BG-Z-B, REGULATOR MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, DC, AW MASS PRO 1/4 MODULAR (NPT), .33069 lb

This is a legacy product, and replaced byAR20K-N02BG-Z-B, REGULATOR, MODULAR, AIRLINE EQUIPMENT, AR MASS PRO, DC, AR MASS PRO 1/4 MODULAR (PT), .72437 lb

This is a legacy product, and replaced byIRV20-N02BG-X3

This is a legacy product, and replaced byAW20-N02BG-2Z-B-X425, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, DC, AW MASS PRO 1/4 MODULAR (NPT), 1.02960 lb

This is a legacy product, and replaced byAW20-N02BG-CZ-B, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, DC, AW MASS PRO 1/4 MODULAR (NPT), .94554 lb

This is a legacy product, and replaced byAW20-N02BG-2Z-B, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, DC, AW MASS PRO 1/4 MODULAR (NPT), 1.02960 lb