1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Rotary Actuator

M 8 x 1.25 x 35 63 CRA1L 63-Y-1Z M10 x 1.5 x 40 80 CRA1L 80-Y-1Z M12 x 1.75 x 50 100 CRA1L100-Y-1Z M12 x 1.75 x 50 * Remove the basic type mounting screws and use the mounting screws included in the foot bracket to secure the foot bracket to the cover.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (10) shows the port size. Table (10) Port size Size Port size 50 to 100 Rc1/4 Perform followings before piping.

REGULATOR

G GC3-10AS GC3-4AS 1 0.2MPa setting GC3P-010AS Pressure gauge cover Rc G36-10-01 Round type pressure gauge G36-4-01 1 0.2MPa setting G36-10-N01 G36-4-N01 1 0.2MPa setting Z Imperial unit Name plate psi Pressure gauge MPa / psi G36-P10-N01-X30 NPT Imperial unit Name plate psi Pressure gauge MPa / psi 0.2MPa setting G36-P4-N01-X30 1Z G G36-10-01 G36-4-01 1 0.2MPa setting

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE4 (B+E4), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Coversion Function)

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE4 (B+E4), Specifications: 3 (0.008 to 0.6 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE4 (B+E4), Specifications: 3 (0.008 to 0.6 MPa Setting), Pressure Unit: ZA (Digital Pressure Switch: w/Unit Coversion Function)

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE4 (B+E4), Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: ZA (Digital Pressure Switch: w/Unit Coversion Function)

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BE4 (B+E4), Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+E4, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Digital Pressure Switch: w/Unit Coversion Function

Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+E4, Specifications: 0.008 to 0.6 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+E4, Specifications: 0.008 to 0.6 MPa Setting, Pressure Unit: Digital Pressure Switch: w/Unit Coversion Function

Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+E4, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Digital Pressure Switch: w/Unit Coversion Function

Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+E4, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

FILTER REGULATOR

setting GC3P-010AS Pressure gauge cover G36-10-01 G46-10-01 Rc G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-

FILTER REGULATOR

setting GC3P-010AS Pressure gauge cover Rc G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting Rc G36

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: H (Set Nut for Panel Mount), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)