ZP

) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Digital Flow Switch (Integrated display type)

and How to Order 10 Summary of Product parts 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24 F2 Setting of OUT2 27 F3 Operating fluid 28 F4 Reference condition 29 F5 Response time 30 F6 Display mode 31 F7 External input 32 F8 Display resolution 35 F9 Auto-preset 36

Gun Type Ionizer

When the external switch signal is not used, cut back the semi-strip wire to prevent any contact with the conductor. 187 Gun Type Ionizer IZG10 Series Dimensions IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment (157) For the bypass nozzle 33 133 24 5 8 147 138 For the bypass nozzle 36 Power supply connector One-touch fitting Applicable tubing

Compressed Air Preparation Filter

Unit: Nm Recommended Torque Connection thread 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 * After tightening by hand, use a tightening tool to tighten an additional 1/6 turn. 2. Select according to the maximum flow rate of the system. 2.

125

Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid: VEX3322 A perspective drawing 4 x 6 (For mounting) 2 x M5 Thread depth 7 (For foot bracket mounting) Manual override (Light/surge voltage suppressor) 45 34 + + 36

Digital Flow Switch (Remote type sensor unit)

Nominal thread size Required torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Model Width across flats of attachment PF2W504 34 mm PF2W520 PF2W540 PF2W511 45 mm PF2W504T 34 mm PF2W520T PF2W540T -16No.PF-OMO0014-D Wiring Connections should only be made with the power supply turned off.

Ｖ cylinder

25 Rod seal 1 8 Bushing 1 26 Piston seal 1 9 Cushion valve 2 27 Cushion seal 2 10 Snap ring 2 28 Cylinder tube gasket 2 11 Tie rod 4 29 Cushion valve seal 2 12 Tie rod nut 8 30 Pipe gasket 2 13 Spring washer 8 31 Gasket 1 14 Pipe 1 32 Speed control needle seal 2 15 Sub plate 1 33 Valve port gasket 4 16 Pipe fitting 1 34 Solenoid valve 1 17 Valve port 2 35 Rod end nut 1 18 Check spring 2 36

SI unit for CC-Link

significant bit). (3) Fuse disconnection details The power supply fuse disconnection for the SI unit solenoid valves can be monitored by the link special register of the master station. 0: Normal 1: Fuse disconnected Buffer area of master station Example: QJ61BT11N b15 b14 b13 b12 b3 b2 b1 b0 (688H)SW0088 16 15 14 13 4 3 2 1 (689H)SW0089 32 31 30 29 20 19 18 17 (68AH)SW008A 48 47 46 45 36

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Table 1: Stroke adjustment range (Without spacer, with short spacer, with long spacer) -10 -20 -30 -40 -50 0 0 to 10 10 to 20 20 to 30 L unit MY2*16 Without spacer Short spacer Long spacer H unit 0 to 12 12 to 24 24 to 36 L unit MY2*25 Without spacer Short spacer Long spacer H unit 0 to 16 16 to 32 32 to 48 L unit H unit Without spacer MY2*40 Short spacer Long spacer -9- Warning 1.

Solenoid Valve

No.SQ1000V-OMQ0002-B 20 No.SQ1000V-OMQ0002-B 21 No.SQ1000V-OMQ0002-B 22 No.SQ1000V-OMQ0002-B 23 No.SQ1000V-OMQ0002-B 24 No.SQ1000V-OMQ0002-B 25 No.SQ1000V-OMQ0002-B 26 No.SQ1000V-OMQ0002-B 27 No.SQ1000V-OMQ0002-B 28 No.SQ1000V-OMQ0002-B 29 No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31 No.SQ1000V-OMQ0002-B 32 No.SQ1000V-OMQ0002-B 33 No.SQ1000V-OMQ0002-B 34 No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36

MHC2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through MHS 5 2.5 4.8 2 2 MHC MHT When closed 10 When open 30 4 MHY 2.5 14 20 12 MHW MRHQ 4 6 10 0.05 Auto switch mounting groove dimensions Misc. 36 D+0.022 0 7H8 depth 1.5 20(48) M3 x 0.5 Finger opening

High Vacuum Angle Valve

Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

ZP

18 36 M12 x 1 M12 x 1 M12 x 1 Vertical 36 Width across flat 14 Vertical Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 10 5 15 10 5 15 10 5 15 Lateral Lateral 2 2 2 With Adapter: Vacuum Inlet 17 16 11.4 1.8 13 8.4 1.8 11 10 6 1.8 With Adapter: Vacuum Inlet 14 Lateral With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-T10B

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Steel 1300 Series VFR5000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Plug-in: 2 Position Single/Double, 3 Position Closed Center/Exhaust Center/Pressure Center 2 position single: VFR510 -F(Z) 0 1 21 [25] 32 [39] 40 [40.5] 31 [36] 31 [36] 25 [24] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB SJ A B 32 [39] 40 [40.5] SY 5 x 3/8, 1/2, 3/4 EA, EB port = 1/2 in case of 3/

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Inside panel standard cord cable 35) USB cable LEC-MR-J3USB Cable length: 3m For CN5 connector minB connector (5 pins) For personal computer connector A connector For connection with PC-AT compatible personal computer 36) Connector set LE-CSNS Connector: 10120-3000PE Shell kit: 10320-52F0-008 (Sumitomo 3M Limited or similar product) 11 5 11.

HRX-OM-R026

Table 3-12 Piping port size Name Port size1 Recommended Recommended piping tightening torque specification Circulating fluid supply Rc1 36 to 38Nm 1.0MPa and more Circulating fluid return Rc1 36 to 38Nm 1.0MPa and more Drain port Rc1/4 8 to 12Nm Facility water inlet *1 Rc1/2 28 to 30Nm 1.0MPa and more.

HRX-OM-W002

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-36 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Output of NOT TEMP READY 11. Press the [] key. Displays screen for setting the output of the NOT TEMP READY signal. The user can select whether thre is an output signal when alarm "AL13 NOT TEMP READY" occurs.

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 8-30-19 Solid state switch Reed switch Rail Grommet 8-30-20 Tie-rod Grommet 2-color indication 8-30-33 Band Grommet MX 8-30-34 8-30-35 Rail Grommet MTS 8-30-36 Tie-rod Grommet MY 8-30-37 CY Direct Grommet