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In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 14 No.VF1000-OMN0002-A S Revision history A Safety Instructions PP 1st printing : oQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

To prevent air leakage, re-wind the sealant tape and fit into the changed location when the piping port location is changed. 14 Auto Switch Handling Precautions Magnetic field resistant auto switches, D-P79WSE and D-P74, are special switches for cylinder with strong magnet built-in, and they are not interchangeable with standard auto switches and cannot be used for general cylinders.

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 14 SV1000*-OME0002-C Revision history CRENEWAL 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Do not apply external force to the pilot valve. 14 SMC will investigate. The following information is required for investigation, so please send it to your sales representatives.

For mounting, please use the included mounting screws (M3 x 0.5 x 14).

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

(set of above items 1 through 14) KT-IR2120 KT-IR2000 KT-IR3000 Note 1) IR1000 uses P36201020-1 and IR1010/1020 use P36201020. Note 2) Use mini-flick type.

Model MXY6 MXY8 MXY12 Allowable kinetic energy for intermediate stop (J) 0.007 0.014 0.047 8-9-14 14 Series MXY Specific Product Precautions 2 Be sure to read before handing. Operating Environment Caution Mounting Caution 8. Do not attach magnets to the table section.

2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 314 264 491 412 804 691 1260 1100 1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 8 20 10 25 12 32 14

5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6 13 108.4 112 14

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

Tightening Torque for Piping Connection thread Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 1/2 Rc2 Rc2 1/2 Rc3 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 48 to 50 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. 5.

D thread depth E A When finger is open : BO When finger is closed : BC Width across flats : F (mm) Model A 16 16 20 20 BO 7 7 7 7 BC 22 22 27 27 E 13 13 15 15 F 14 14 17 17 D M81.25 M81.25 M101.5 M101.5 Weight (g) 863 1,194 2,108 2,933 MHT2-32DZ-X5060 MHT2-40DZ-X5060 MHT2-50DZ-X5060 MHT2-63DZ-X5060 Symbol -X5070 With Boss in Head Side 2 MHT2 X5070 DZ Bore size Use the cylinder Series CDQ2

SMC Corporation Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 11-E573 D-SZ Printing QR 7850SZ Step Motor Driver (Pulse Input Type) For Step Motor Series LECPA RoHS A driver that uses pulse signals to allow positioning at any position.

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

PneuAlpha Series Terminal Layout. 19 4.1 Installation Wiring Notes . 13 4.2 Wire Size and Specifications . 13 4.3 Power Supply. 14 4.4 Recommended Power Input Wiring Diagram. 14 4.5 AC Input Wiring. 15 4.5.1 AC Input Wiring Diagram. 15 4.6 Wiring Diagrams for the Sink/Source Terminals . 16 4.6.1 Source (+ Common) Input Wiring Diagram. 16 4.6.2 Sink ("-" Common) Input Wiring Diagram . 16 4.7

Refer to pages 14-21-3 and 14-214 for Safety Instructions and Common Precautions. Piping Warning Port size 1. When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards.