Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

(1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-10,15 1122MDHR2-20,30 1122H H L L When auto switch D-M9N, D-M9P, D-M9B is used When auto switch D-M9NV, D-M9PV, D-M9BV is used When auto switch D-M9NV, D-M9PV, D-M9BV is used (mm) Max. protrusion of auto switch from edge of body: H Max. protrusion of auto switch from edge of body: L, H (mm) Auto switch model Auto switch model D-M9V Air gripper model D-M9V D-M9 6.8 6.8 MDHR2-20 MDHR2

Steam Valve

8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Ejector Valve Unit Series ZYY/ZYX

NPN open collector, single output Analog, no output, 3 turn setting 14 NPN open collector, single output Analog, no output, 200 degree setting 15 Electrical entry NPN open collector, double output Analog, no output, 3 turn setting 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 16 G H L LN LO M MN MO Lead wire length 300 mm Lead wire length 600 mm With lead wires (Length 300 mm) Without lead wires

Counter/Extension Cable

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC Nil B RS-232C MK(2) RS-232C + BCD RS Q G RS H A RZQ Connection Method MI W S CEP1 Yellow Brown White Black Extension cable Blue Red CE1 F.G. CE2 High precision stroke reading cylinder A COM COM COM B 12 VDC GND F.G. R.S.

NCA1

How To Order NC D A1 B 150 0400 R + 0200 H XC11 Auto Switch Mounting Bore Stroke B-A Stroke B Dual Operation Single Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B BA C D DD E EA EE G J NT TN WF XT Y LF P A PB PC 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1/4-20 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200

IDUS/IDFS

HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

IZx-OMX0087

Enclosed or poorly ventilated environment h. Locations which are exposed to direct sunlight or heat radiation. i. Areas where strong electromagnetic noise is generated, such as strong electrical and magnetic fields or supply voltage spikes. j. Environment where static electricity is generated to the product. k. Locations where strong high frequency is generated. l.

HRX-OM-X010

Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg C At maximum frequency operation by inverter HRZ008-L-F [ 6 0 H z ] 1.2 [ 6 0 H z ] 1.1 1.0 [Supply Port] [ 5 0 H z ] 0.9 Pressure [MPa] 0.8 [ 5 0 H z ] 0.7 0.6 0.5 0.4 0.3 [Return Port] 0.2 0.1 0.0 0 5 10 15 20 25 30 35 40 Flow Rate [L/min] Fig. 8-14 Pump Performance Curve ( HRZ008-L-F ) When circulating fluid flow rate lowers

High Vacuum L Type Valve

B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257

XL-OMV0002

B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

K35-OMW0031

HART Communication 30 h Pistonrod Retract end Moving area Output current value Total time (h) Display time (h) Piston movement 0% 5% ~5% ~4.8mA 3.125 3 10% 5~10% 4.8~5.6mA 0.625 0 10~30% 5.6~8.8mA 2.5 2 30% 30~50% 8.8~12mA 6.25 6 50% 50~70% 12~15.2mA 2.5 2 70% 70~90% 15.2~18.4mA 7.5 7 90% 95% 90~95% 18.4~19.2mA 1.875 1 100% 95%~ 19.2mA~ 5.625 5 Extended end (Set point by calibration) Total

CEU1

C O(100ms) H C SEL DATA SET MODE [SET] [SET] 13 CEU1 CEU5 99.5(mm)100.5(mm)OUT2 (OUT2-COM ON) 100.0OUT2 0.5OUT2 C 1 MODE SEL OUT2 4 SHIFT 1 DATA 100.0 1 SET 1 MODE 1 SHIFT 5 DATA 0.5 1 SET 1 MODE 3 DATA C() 1 SET 1 MODE 8 8 8 8-1 1 1 1 H A L H B L 2 3 4 5 0 1 2 3 4 8 8 8 8-2 2 2 2 LCD ON OFF ON OFF A B (+) (-) (+) (-) (+) () (-) () 100ms LCD 100ms ON + 100ms ON

LEKF-OMZ0035

Cable type Cable length[m] Grease application (Seal band part) Nil Without cable Nil Without cable Nil With 3 3 S Standard cable N Without (Roller specification) 5 5 R Robotic cable A 10 (Flexible cable) C 20 Driver type I/O cable length Compatible Power supply Nil Without cable drivers voltage [V] H Without cable Connector only Nil Without driver 1 1.5 [m] M2 LECYM2-V 200 to 230 U2 LECYU2

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Note 5) When Nil is selected, the product will not come with a built-in magnet for an auto switch, and so a mounting bracket cannot be L E F S H 25 G B 200 C N K R1 CDH7T Motor type Lead[mm] Size Accuracy Motor mounting position Nil Basic type 16 25 32 40 Symbol LEFS16 LEFS25 LEFS32 LEFS40 Nil In-line High performance H High-precision type R Right side parallel G battery-less absolute H 20

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12