M-E05-1-LQ1

Refer to the proper tightening torques shown below. 3 4 5 Nut tightening torque for piping Body class Torque (Nm) LQ1 LQ2 1 0.12 to 0.25 2 0.3 to 0.4 1.5 to 2.0 3 0.8 to 1.0 3.0 to 3.5 4 1.0 to 1.2 7.5 to 9.0 5 2.5 to 3.0 11.0 to 13.0 6 5.5 to 6.0 End surface 6 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com

HRX-OM-Z018_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-Z039_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HEC_W-E

*Therefore, moisture in the air starts to condensate when the air temperature becomes lower than this temperature. 10-3 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation

HEC-OM-Y008

I K SV C L D E A Display/Operation panel G Main power switch B Reservoir Cap H Power supply connector C Level gauge I Communication connector 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMV0017 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 19 XL-OMV0017

XLA Series

Insert the cover. 15 XL*-OMI0009-E Revision E Precaution for mounting added. 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 16 XL*-OMI0009-E

XLA- ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 14 XL*-OML0013-B Revision history Safety Instructions PQ Limited warranty and Disclaimer SR 1st Printing :MP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All

XL-OMV0002

-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

XLDV Series

(Ensure there is no fiber or dust on it.) 1(P) SUP 13 XL-OMM0005-A Revision history Safety Instructions P P P Po o o o 1st Printing :NQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation

XLGR Series

Perform final torque with same numerical order. 18 XL-OMP0001 Revision history 1st Printing :PR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved 19 XL-OMP0001

High Vacuum L Type Valve

Insert the Cover. 14 XL*-OMJ0005-C Revision C Renewal 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved XL*-OMJ0005-C

XL-OMY0003

XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O 101

XLJ- -*G1 Series 25 40

Tighten the bolts gradually in numerical order (alternately) with bonnet assembly held. 11 XL-OMU0002-A Revision history A 40 size added WU 1st Printing :UX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

XMC/XYC Series

Perform final torque with same numerical order. 15 XM-OMP0002-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

XMD/XYD Series

When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order. 15 XL-OMP0003-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice

XMH/XYH Series

Place the O ring on the O ring mounting surface. 12 XM-OMP0005-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

XG_-OMV0028

XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS XGT31*-50336-*C 9 D XGT300-50DS XGT31*-50336-*F XGT0402-9-12S XGT31*-50336-*C C016 30D006 100 12 (AMP) 6. 11 - 7. 0.45MPa O O O O O ,O ASSY ASSY O O 4-3 0.45MPa ASSY ASSY 4-3 0.45MPa ASSY ASSY ASSY ASSY ASSY 12 - A 13 - 14 - 15 - Revision history A : ASSY 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

CYV_EN

Model Selection 2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved