EXxx-OMQ0015CN

1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766 0 1 0 0 4 PLC : 032767 +0 +32767 PLC : 3276865535 -0 -32767 : 15 V 50001000 4VPLC 4000 -50No.EX-OMQ0015CN (1) [H.T.]

Digital Flow Switch

[oU2] page 36 [1000] 1000 L/min (PFMB7202) [ 25] 25 L/min (PFMB7501) [H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMB7102) [100] 100 L/min (PFMB7202) [F 3] [rES] [rES] Response time [1.00] 1 second page 41 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 42 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 43 [F20] [inP] [inP] External input 3 [rAC] Accumulated

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

HEC-OM-U015

Inrush current 50A or less 1000 1000 Over current protection 14A circuit protector Facility water temp. 20deg.C Do not peel off or rub alert warning and caution labels.

Digital Flow Switch

) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input 3 [REACUM] Accumulated flow external reset page 47 [F22] [ Fr E] Setting of analogue output 4 [ oFF] Variable

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

CNG

1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200 40 100 100

AC

Note 4) The use of the straight type cable connector is recommended. 1.12-9 Booster Regulator VBA1110 to 4200 Specifications Model Handle operated style Air operated style VBA1110 VBA200 VBA400 Model Pressure increase ratio MAX. 2 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 VBA2200-03 VBA4200-04 Max. flow l/min (ANR) 400 60 1000 1900 1000 1900 (1) VBA1 MAX. 4 1/2 (IN/OUT) 1/4 (IN/OUT) Connecting

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36 72 10 3 9 55 up to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B

ML1

100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

VFS

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Air Slide Table

My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30 May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 = 1 2 = 0.39/18 = 0.022 Examine Mr. Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5 Mar = 36 Mrmax = 36 K = 1 = 1 '2 = 0.39/36 = 0.011 Find the static moment M (Nm).

Air Slide Table Series MXJ

4 (Class 1000 or equivalent) Intensive vacuum suction prevents the particles from discharging inside a clean room.

q"s

tuoe) 2 1/4 (1000. 2000 tvoe) 3/8 (2000 type) Without bracket I Flat bracket L-bracket World Wide QS\E Support...

MXS

L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 420 E= 1( ) =0.088 2 1000 V=1.4 X 300=420 Calculate kinetic energy E (J) of work. Calculate allwable kinetic energy Ea (J). Check that kinetic energy of work does not exceed allowable kinetic energy.

25

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

MXQ

Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5 Mar = 36 Mrmax = 36 K = 1 = 1 '2 = 0.39/36 = 0.011 Examine My. My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30 May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 = 1 2 = 0.39/18 = 0.022 M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3) Find the static moment M (Nm).

Electric Rotary Table

Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104 Sliding bearing Series LEL25M Ball bushing bearing Series LEL25L

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder