Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Large Flow Lubricator AL800/900 Series

2 w u !0 !5 !4 Component Parts Replacement Parts No. Description Material Note No. Description Material Part no. Qty.

Pilot Operated Regulator AR425 to 935 Series

4 , and pushes valve (main valve) u open, thus guiding the pressure to the OUT side. At the same time, the pressure passes through feedback hole !5 , and enters diaphragm chamber !6 , thus establishing the OUT side pressure (outlet pressure). Relief port Be sure to read this before handling the products.

CJ2Q

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

l

Air Cylinder/Low Friction Series CS1lQ Non-lube/125, 140, 160 How to Order Standard L Q 160 300 JR CS1 160 A53 L Q 300 JR CDS1 With auto switch Number of auto switches 2 1 3 n S 3 n With auto switch Mounting Basic Foot Front flange Rear flange Single clevis Double clevis Center clevis B L F G C D T Auto switch Low friction Without auto switch * Select the applicable auto switch from the

KK/KK13

Part no. 1/4" KK13S-07B 1/4" KK13P-07B 5/16" 09B 5/16" -09B 3/8" -11B 3/8" -11B 1/2" -13B 1/2" -13B 10 S Couplers Series KK13 M a n u Specifications Fluid Air Note 1) Operating pressure range 0 to 1.5MPa Proof pressure 2MPa Ambient and fluid temperature 5 to 60C Plating Nickel plated external metal parts Note 1) Cannot be used with water.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

VT317

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y.

VT325

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

Size: 01 (1/8), Thread: F (G), Mounting Option: Mounting Screw, Round Head Combination Screw

Size: 01 (1/8), Thread: F (G), Mounting Option: Mounting Screw, Round Head Combination Screw

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Ambient Dryer Series AMG

I + (mm) Port Size ai F wnn Brrc|{n . f t l . K L, :!

For Water Digital Flow Switch Series PFW

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: F (G), Option: F (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector w/o Cable), Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: F (G), Option: F (Bracket)