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D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes. Made to Order If you require the moisture control tube with an effective length not listed in the above table, please contact SMC. 1

kPa 100 kPa 100 kPa 300 kPa 0.05 0.5 300 kPa 300 kPa 0.10 0.00 0.0 0.00 0.0 0.1 0.2 0.3 0.4 0.5 0.0 0.6 0.8 0.2 0.4 1.0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 Flow rate [l/min] Flow rate [l/min] Flow rate [l/min] 954 Flow Sensor Series PFMV5 Dimensions PFMV5-1 PFMV5F-1 0.8 34.4 10 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n

ISA2-G ISA2-H Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Supply pressure: 100 kPa Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 5 m Supply pressure: 100 kPa Detection distance-Response time characteristics Detection distance-Response time characteristics Detection nozzle: 1.5 Detection side piping: 6 x 4 Supply pressure: 100 kPa Set distance: 0.15 mm Detection

Rated current 6 Branch port C (COM A) 48 52 7 Branch port D (COM D) After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

Amplifier lmpedance 100Ko 3ignal Voltage Range 0-1 0 vDc 0-svDc qppllcable Polentiometer 1OKA (1/8W or above) not provided itep Besponse 60ms (0.75A,95'/d )lther Frequency Adlustable Range 100-200 Hz (Factory adjusted @ 125H2) 12Q-19QHz (Factory adiusted @ 140H2) {ull Adjustable Range 0-0.5A (Factory adjusted @ 0A Sain Adlustable Range 5UU-/5UmA aI an InpUI voltage of 10V 500mA-14 at an input

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AC power supply cable of the exclusive AC adapter has a socket configuration that is for 100 VAC. The AC adapter is applicable to 100 to 240V. Replace it with a socket that is applicable to other voltage if necessary. The socket needs to be prepared by the user. 8. D-class ground connection (ground with a resistance of less than 100) MUST be used to the product.

AC power supply cable of the exclusive AC adapter has a socket configuration that is for 100 VAC. The AC adapter is applicable to 100 to 240V. Replace it with a socket that is applicable to other voltage if necessary. The socket needs to be prepared by the user. 8. D-class ground connection (ground with a resistance of less than 100) MUST be used to the product.

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

8.2 115 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 2 60 VX3 No freezing Equivalent size VXA VN Pilot Operated Solenoid Valve Specifications LVC Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent (130C

Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN http://www.smcworld.com 2011 SMC Corporation All Rights Reserved 10-E569 D-DN Printing PQ 12450SZ Circulating Fluid Temperature Controller Thermo-chiller Compact Type Series HRS 4700 W/5100 W (50/60 Hz) cooling capacity added!