Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

pa

First find the ratio of the discharge rate for fresh water when viscosity is 100 mPas from the graph below. It is determined to be 45%. 2. Next, in the required specification example, the viscosity is 100 mPas and the discharge rate is 2.7 l/min.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

CC

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring I-J010C 10 8 21 M4 x 0.7 3.3 +0.048 0 3.1 8 9 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 I-J016C 16 8 25 M5 x 0.8 5+0.048 0 6.4 12 14 IY-J015 16 50.030 0.060 4.8 16.6 12.2 1.5 0.7 Type C 5 CD-Z015 16 50.030 0.060 4.8 22.7 18.3 1.5 0.7 Type C 5 * Retaining rings

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

JXCx-OMT0032CN

M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin

KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

HRX-OM-X071

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Digital Flow Switch (Integrated display type)

Without T: 0 to 50 C (no condensation or freezing) (no condensation With T: 0 to 90 C (no condensation or freezing) or freezing) Rated flow range 0.5 to 4.0 2 to 16 5 to 40 10 to 100 L/min L/min L/min L/min Instantaneous Setting/display flow range 2 0.35 to 4.50 1.7 to 17.0 3.5 to 45.0 7 to 110 L/min L/min L/min L/min flow Min. setting/display unit 0.05 0.1 0.5 1 Flow L/min L/min L/min L

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

EXxx-OMY0004

Withstand voltage 500 VAC for 1 min. between FE and all accessible terminals to IEC 61131-2 Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation: 80 kPa to 108 kPa (under 2000 m) Storage: 66 kPa to 108 kPa (under 3500 m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration

Digital Flow Switch (Remote type monitor unit)

Storage: -25 to 85 C (no freezing or condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Air Cylinder CP Series Cylinder Positioner Assembly

z 1 . 7 a x.43 o 1 ) 2.24 (58) M26x1.51 5 7 a40) c 9 8 125\ 4.96 (126\ 1.42 140 l;$?'

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

REC

4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.