Body Ported Type Vacuum Ejector ZH Series

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

PF3W3.eng

Approx. 1 second M3 x 8 L Water proof seal (accesorys) Measurement mode 4 L/min 40 L/min 100 L/min 16 L/min 250 L/min Panel Be sure to select the correct sensor to be connected. Caution *: The panel mount adapter can be rotated through 90 degrees for mounting. *: The panel mount adapter should be fixed firmly with screws. Otherwise, fluids such as water may enter.

AMX-OM-Q018E

min(ANR) Standard Performance conditions 25 50 100 200 300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure

CYP_EN

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

DM

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

Antistatic Tubing Series TA

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

KDM

Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Caution Be sure

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Electrostatic Sensor Monitor

. -6No.SFOD-OMO0004-B Model Indication and How to Order Options/Part number Description Part number Remarks Power and output lead wire ZS-28-A Length 2 m Bracket ZS-28-B With M3x5 L (2 pcs.) Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.)

AS

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speedcontroller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs. Threadedstudkitformanifold AS-32B 1 pc. 616

IMPACT BLOW GUN

after R thread installation R1/4 L [mm] Part no.

VX31/32/33

Table (1) Model Orifice Diameter Port Size Table (3) Rated Voltage Electrical Option Solenoid valve model Orifice symbol (diameter) 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) Class B Rated voltage Z S L VX31 Model VX32 VX33 With light and surge voltage suppressor Voltage With surge voltage suppressor AC/ DC Voltage symbol With light 01 (1/8) 02 (1/4) Port symbol (Port size) 1 2 3 4 7 8 J

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Inch size Body type Option (With/Without bracket) Symbol Bore size Applicable model Symbol Flow rate (l/min (ANR)) Filtration area (mm2) Option None (Without bracket) With bracket Symbol Nil B ZFC05 ZFC10 ZFC20 05 10 20 10 20 50 470 750 1255 01 03 07 09 1/8" 5/32" 1/4" 5/16" Inch size (Release button: Orange) Principal Parts Material Replacement Element Part No.

5 Port Solenoid Valve Series SQ1000/2000

1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02 to 24 B K Option specifications Specifies DIN rail length Back pressure check valve on all stations Special wiring specification (except double wiring) With name plate (valve with side port specification only) External pilot specification Built-in silencer Valve stations Symbol Stations 1 station 01

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Electrical entry 2(B) 4(A) Symbol Electrical entry L-type plug connector B Note 2) 5(EA) 3(EB) 1(P) L 4-position dual 3 port valves (N.C./N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Lead wire length 300 mm Symbol 3 6 10 15 20 30 100 Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

seals Type of actuation Cylinder port size 2 position 3 position One-touch fitting Pressure center Effective area mm (Cv factor) Exhaust center Closed center Series C3 C4 C6 (6) M5 (3.2) (4) Double Single VQ130 Metal seal VQ131 Rubber seal 4.5 (0.25) 6.3 (0.35) 54 Series VQ1000 How to Order Manifolds VV5Q13 (-00T) J Series VQ1000 P, R port inch bore size Stations Options Symbol Stations 01