VM

F.O.F. 20N 30 O.T. 50 T.T. Adjustable Roller Lever/VM830-01-13 JIS Symbol 20N F.O.F. At lever length 38.1mm 20 P.T. 30 O.T. 50 T.T. Adjustable Rod Lever/VM830-01-14 JIS Symbol 2.3N F.O.F.

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

available in the series are the LECSC, CC-Link direct input type for an absolute encoder, and the LECSS, SSCNETlll type for an absolute encoder.AC servo motor controller , 2 controller types: absolute encoder, incremental encoder , Power supply voltage: 100 to 120VAC or 200 to 230VAC, Pulse type, CC-Link direct input type, or SSCNETlll type, NO SIZE RATING, ACTUATOR, ELECTRIC ACTUATOR, 2C

series are the LECSC, CC-Link direct input type for an absolute encoder, and the LECSS, SSCNETlll type for an absolute encoder.AC servo motor controller , 2 controller types: absolute encoder, incremental encoder , Power supply voltage: 100 to 120VAC or 200 to 230VAC, Pulse type, CC-Link direct input type, or SSCNETlll type, LE ACTUATOR, NO SIZE RATING, ACTUATOR, ELECTRIC ACTUATOR, 2C

series are the LECSC, CC-Link direct input type for an absolute encoder, and the LECSS, SSCNETlll type for an absolute encoder.AC servo motor controller , 2 controller types: absolute encoder, incremental encoder , Power supply voltage: 100 to 120VAC or 200 to 230VAC, Pulse type, CC-Link direct input type, or SSCNETlll type, LE ACTUATOR, NO SIZE RATING, ACTUATOR, ELECTRIC ACTUATOR, 2C

AFF

X17 P.69 Port size X26 P.70 Symbol Size 2C Applicable body size Accessory Option 3 4C 8C 11C 22C Symbol Nil Description Symbol Nil Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 B Bracket 2 Rubber material: Fluororubber For medium air pressure (1.6 MPa) Drain guide 1/4 female threaded 4 F H J R S U T V 2 Bracket is included, (but not assembled).

CM2x-OM0230Q

GR-S-010(10g)GR-S-02020g 2. 3. 4. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 21 - 1. 2. 1. 2. 3. 1. 2. . 1. 2. 1. 2. 3. 1. 22 - 7. 6. 1 2A A 2B B 2C C 3 4 5 6 7 8 9 A 10 B 25 A 11 12 13 14 15 16 17 CDM2 23 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

CATALOG VC10

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

CE

F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

VZS

Manual override Indicator light U side 300 Lead wire length 2n-Rc 1/8, 1/4, C6, C8 Double check spacer (n) Individual SUP spacer (1) (2) Stations Control unit Pressure unit Filter element Drain cock D side Outlet for check Control unit n: Stations L Stations Formula 20n + 21 20n + 176 20n + 232.5 4 101 5 121 6 141 7 161 8 181 9 201 10 221 11 241 12 261 13 281 14 301 15 321 16 341 17 361

ZL3-OM00801

3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

C85

3 (Switch type only) 2C C85 2D (2 for switch type) e r C95 5A CP95 (Switch type piston) 5B Nickel plating NCM C85RA B20/25 NCA D!6 i y !4 u q r e !1 t !5 !3 !0 !2 o 2C 2D !

High Vacuum Slit Valve

Because of this, the lateral position is made unfixed. 3-2-4 Clamp release (Figure 2C to Figure 2B) Since the roller block is moved down when pressure is applied to OPEN side of pressure piping (in other words, pressure is exhausted from CLOSE side of pressure piping), the roller bearing B moves left along with the cam groove .

Parallel Seal Type Slit Valve

Figure 2C shows a state in which Gate is clamped and Seal surface is sealed by Sealing material of Gate . 3-2 Construction In Figures 1 and 2, Piston rod integrated with Piston and Moving base are connected by a displaceable mechanism. And Roller block is fixed to Moving base .

C85

0 5A 2A 2B 2C 2D CJ1 CJP Y Front nose in line port N Basic style integrated clevis E Double end F Front nose u !

E-MY2B_E_A

Allowable external resistance Nominal size Allowable external resistance 16 10N 25 20N When the floating bracket is used Installation of a holding bolt. Install the pin and the conical spring washer in the slider with a holding bolt.