PAB-OM-C006-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved C aution During operation C heck liquid and air leakage, and operation conditions

PAB-OM-B007-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved Pilot valve set K T PA 5 3 8 NBR diaphragm set K T PA 5 3 2 PT F E diaphragm

PAB-OM-C007-B

C ircuit(1 ) C ircuit(2 ) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved C aution During operation C heck liquid and air leakage, and operation conditions

Process Pump

Circuit example (1) Recommended Valve Circuit example (2) VQZ240 (Exhaust center) 16 Dimensions 17 Revision 19-Feb-2021 Initial release 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

Process Pump

Circuit example 5 port solenoid valve (Exhaust center) Process Regulator Pump Throttle FLUID Air filter P1 OUT Air supply P2 FLUID IN Strainer Transfer fluid 16 Dimensions Integrated fitting type With nut Tube extension 17 24-Sep-2019 Revision F Completely revised by format change. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Process Pump

Outer dimensions PB1011A-01PB1013A-0119 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Process Pump

Delete Sensor mounting (stroke sensor). 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 14

Valve Controller

Stop signal Fig. 22 Sequence Revision history B:complete revision C:Change dip switch operation D:complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Valve Controller

Stop signal Fig. 22 Sequence Revision A:complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

IBV-OMY0015

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

High Speed 2 Port Valve

Downstream side flow of the valve is restricted. 9 SX10-OMR0002-A Revision ARENEWAL 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved No.SX10-OMR0002-A

Low Profile 2/3-Port Solenoid Valve

. -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

VN-OMP0002

O O O 12 13 14 8 VN-OMP0002 Revision history 1st printing : Py 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN-OMP0002

VN-OMJ0001

O O O 12 13 14 8 VN*-OMJ0001-B Revision history Renewal PU Renewal PX 1st printing : JW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN*-OMJ0001-B

SGC200-OMJ0004

DC DIN IP65() ( ( ( ( ) ) ) ) (4.5~7) IP65() NL:,R: LED:,R: V: V: 180 AC DIN (DO) DIN :4.57()JIS C 3306 0.51.5mm 22 ,3 O :JIS C2805 R1.25-M4 Y :1.253Y 1.5 2.5~3.75Nm 0.5~0.6Nm () () () DIN 3 0.4~0.5Nm 10 SGC200*-OMJ0004-A , () ( 1(P),12 ) (2 ) (1 ) , 11 SGC200*-OMJ0004-A , , , , 12 SGC200*-OMJ0004-A Revision history A ,JIS RY LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VN-OMP0001

pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa 0.97MPa ,MPa ,MPa m/s m/s Vm/s Ql/min dmm 8 VN-OMP0001 9 VN-OMP0001 Revision history 1st printing:PT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VN-OMT0001

/ / / / 1.5~2 1) 2) 3) 30 1 1) 2)1 0.1MPa 3)0.1MPa Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4 4042 2 2 2 2 Rc1 1/2 4850 Rc2 4850 5 VN-OMT0001 VND / / / / 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

Vinyl Chloride Air Operated Valve

1)No main pressure 2)Side failure of piston packing Check to proper pressure Yes Replace product 1)Internal lackage 1)Instrusion of particles 2)Flaws on valve seat Eliminate to proper pressure Replace product Failure of air tight 2)External leakage 1)Tightening failure 2)Breakage of Tighten additionally Replace product diaphragm 8 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

R R R REGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS LVR LVR LVR LVR Series Series Series Series

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved 13