ZQ

x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

ISA PV 6.5 PSE 8 V 10 IS 10 17.6 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 ISG ZSM Connector type: ZSE2-0X-15C Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x

Rotary Table Series MSU

x 0.8 (10-32 nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

Platform Cylinder Series CXT

D25 125 900 32 1100 140 -X 40 1900 170 Individual -X 523 Platform Cylinder Series CXT 12, 16, 20, 25, 32, 40 How to Order Port thread type 12 to 25 M thread Rc NPT G Nil TN TF 32, 40 CXT 20 100 M B M9BW Made to Order Platform cylinder Refer to page 525 for details. Bearing type Number of auto switches Slide bearing Ball bushing bearing M L 2 pcs. 1 pc. n pcs.

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

Rotary Table: High Precision Type

Rotary table with auto switch 32 How to order (with auto switch) 32 Applicable auto switches 33 Auto switch specification 33 Auto switch orientation 34 Table positioning pin hole rotation range and auto switch mounting position 35 How to change the auto switch detecting position 35 Auto switch operating angle and hysteresis angle 36 Operating range and hysteresis auto switch 37 Internal

PSxx-OMU0005CN

01 N01 C4L C6L M50.8 R1/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Heavy Duty Stopper Cylinder Series RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Order no.

RSH

Flange Mounting REA M5 X 0.8 Rc(PT)1 / 8 Rc(PT)1 / 8 Rc(PT)1 / 4 Rc(PT)1 / 4 Port size Attachable Auto switch REC RHC Standard Stroke (mm) MTS Standard stroke Bore size (mm) 20 15 CC 32 20 50 30 63 30 80 40 Weight (kg) Bore size (mm) Action Weight Rod end configuration 20 0.41 Double acting 32 0.75 Lever with built-in shock absorber 50 Single acting 2.03 63 3.56 Double acting with spring

Compact Vacuum Unit Ejector/ Vacuum Pump System

1/8 One-touch tube fitting Inch size LN3 Elbow type 5/32 One-touch tube fitting 34 - Doc. no.

Plug-in/Plug Lead: Single Unit

(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

Air Cylinder

Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16

17

A MY L2 25 6N Stroke adjustment unit Intermediate fixing spacer Stroke adjustment unit Intermediate fixing spacer Nil Without Spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit no.

Transfer

Nil Without spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit part no.