P_3 or n_3 and the set point value light up alternately. 16-2-41 18 Series ZSE 50 60F/ISE 50 60 Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Auto preset (Example: Adsorption Confirmation) 1. Auto preset mode 2. Preparation of auto preset 3. OUT1 auto preset SET Press the SET button. Repeat vacuum and break several times while AIL is displayed.
PAX PB 17-5-59 18 Series LVD High Purity Chemical Valve, Compact Type Precautions 2 Be sure to read before handling. Installation and Removal of Tubing for Pilot Port Section Operating Environment Caution Warning 1. Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle.
LVQ60S-S25-3 PAX 25.5 46 31.5 58 7 15 83 35.3 10.6 7 23.5 47 29.5 59 7 15 113.5 36.9 16.5 10 PB 23.5 47 29.5 59 7 20 119 37.9 22 35 70 41 82 7 20 171.5 64 25 17 35 70 41 82 7 20 182.5 66 32 With indicator, High back pressure spec. with indicator N.C. valve Dimensions (mm) S Model LVQ20S-S07-4 LVQ30S-S11-4 LVQ40S-S13-4 LVQ50S-S19-4 LVQ60S-S25-4 S 70.5 88.5 94 A B SMC 134.5 144 17-5-79 18
www.stevenengineering.com FLUID OUT PROCESS PUMP VX3 P1 2 VXA 90 74.5 FLUID I N VN P2 44.5 3 32 Rc 1/4 AIR SUP(P2) LVC 100 130 LVA FLUID IN Rc 3/8 LVH LVD PA5000 179 4-9 LVQ LQ LVN 90 90 TI/ TIL PA FLUID OUT Rc1/2, 3/4 AIR SUP(P1) Rc 1/4 112 PAX 56 165 56 PB RESET FLUID OUT PROCESS PUMP 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP(P2) FLUID IN Rc 1/2, 3/4 Rc1/4 17-5-157 18
1 Compact Direct Operated 2/3 Port Solenoid Valve For Water and Air Series VDW Compact (as compared to Series VX) Single valve volume: Reduced by 75% (VDW20) Manifold length: Reduced by 18% (VDW30, 7 stations) Lightweight (as compared to Series VX) 100 g: Reduced approx. by 50% (for orifice size equivalent to 2) VC VDW VQ VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
VDW VQ Flow characteristics Weight (kg) External pilot solenoid Port size Rc Orifice size (mm) Air operated Model Cv Effective area (mm)2 VX2 VNA4-25A VNA5-32A VNA6-40A VNA7-50A 1 25 32 40 50 220 320 500 770 0.8 1.3 2.1 3.1 0.9 1.4 2.2 3.2 12 18 28 43 VX 1 4 1 2 1 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local
258-9200-www.stevenengineering.com VX3 Main port VXA VN Main port Rc Pilot port Rc A LVC B C D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18
noise (dB) Apparent power VA Temperature rise (C) (Rated voltage) Power consumptions W (Holding) Air operated type Voltage fluctuation (%) Frequency (Hz) Power source VXA Model With silencer Holding Without silencer Inrush VN AC 50 20 11 4.5 60 45 35 55 45 35 55 60 50 60 Rated value 10 104 VXF 2150 83 LVC DC 6 VXF 2160 AC 50 20 11 4.5 60 6 DC Rated value 10 105 LVA 85 VXF 2280 AC 50 40 18
valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18
pressure 1.5MPa (217 psi) 5 to 60C (23 to 140F) (with no freezing) Ambient and fluid temperature M5 x 0.8 (10-32 nominal) Pressure gauge port size Weight kg (lb) 0.33 (0.73) 0.30 (0.66) 0.33 (0.73) 0.30 (0.66) 0.33 (0.73) 0.30 (0.66) PA 14 (0.78) 31 (1.72) 15 (0.83) Supply side effective area (mm) when P1 = 0.7MPa, P2 = 0.5MPa (Cv) PB 15 (0.83) 16 (0.89) 35 (1.94) AEA 40 (2.22) 40 (2.22) 18
L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover
for release valve control (timer setting with PLC is unnecessary) Allows sharing of switch/valve power supply, and single line for suction signal (valve wiring is unnecessary) Timer can be easily adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18
duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18
Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18
Auto Switch Groove Bore size (mm) A B 10.3 13 15 18 21 23 27 25 35 27 10 16 20 25 32 58 5 Series ZCDUK Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W ( ): Denotes the values of D-A93.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09
valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm) Maximum suction flow rate (l/min (ANR)) 18
COMBINATION NAC 5020, 5520. 6020 Series AIR FILTER NAF 5000, 6000 Series 8-9 REGULATOR NAR 5000, 6000 Series r0-12 LUBRICATOR NAL 5000, 6000 Series 13-14 ATTACH MENTS, ACCESSORIES 15-18 19 NAC .Del8.|lir|.
Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'?) Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)
Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'?) Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)