SMC Corporation of America
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SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

Indicator light IS 3 2 Lead wire R 1/8 Port size ZSM 65 g Weight PF2 IF Electrical Specifications Data ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 30 V, Max. 100 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC Operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Lead

VXA223 VXA224 VXA225 VXA226 VXA226 0.5 1.0 1.0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11

The compatibility should be judged by the customer before adopting the product. 790 Vacuum Flow ZH--X185 Series RoHS How to Order B X185 ZH 20 Passage diameter Dust bag Nil D Without dust bag With dust bag (Supplied with product) Hose band attached mm Symbol Bracket Nil B Without bracket With bracket 10 20 30 40 13 21.6 30 42 SP ZCUK Specifications Warning Model ZH10-X185 ZH20-X185 ZH30-

Output display (Indicator LED) Rc(NPT)3/8 15 to 20 Nm [ dtH1] Delay time setting at ON [ 0.00] 0.00 s Specification Rc(NPT)1/2 20 to 25 Nm [ dtL1] Delay time setting at OFF [ 0.00] 0.00 s DOWN button Rc(NPT)3/4 28 to 30 Nm [ CoL] Display colour (OUT1) [ 1SoG] ON: Green, OFF: Red (OUT1) Sub screen Unit display The IODD file can be downloaded from the SMC website (URL https://www.smcworld.com

0.7 0.5 to 500 Series MQM Lateral load resisting low friction cylinders for low pressure, low speed, uniform speed, low friction high pressure, high speed and high speed response (high frequency) actuation Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 15 30 45 60 75 100 6(standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10

Standard specifications AL30 AL40 AL60 AL10 AL40-06 AL20 AL50 Model Port sizes 1/4, 3/8 1/4, 3/8, 1/2 1 M5 x 0.8 3/4 1/8, 1/4 3/4, 1 Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa 1/4: 30 3/8: 40 1/2: 50 Note 1) 1/4: 30 3/8: 40 220 4 50 15 190 Minimum dripping flow rate [L/min (ANR)] Oil capacity (cm3) 55 135 7 135 25 135 135 Recommended lubricant Class 1 turbine oil (ISO

(mm) Effective orifice(mm 2) A D1 D2 L1 L2 1 8 KRL06-02S KRL06-01S 12.8 10.8 33.8 13.9 21.9 35.9 26.3 27.3 37.3 10 27.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 1 4 10 22 6 31 29.5 19 5.0 14 17 12 14 17 16.8 3 8 1 8 KRL06-03S 30 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 32 33.5 34.4 35.4 36.9 8 19.2 12 25 20.5 14.9 17 23.3 10 17 28.5 23 25.0

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port Inlet; 4-Gauge Port

The maximum operating 0 5 10 15 20 25 30 ( temperature for the valve is 150oC. If the heater temperature is over 200oC or valve temperature is Time (sec.) over 150oC, please use thermostat to control the Duration of the inrush current flow (as a guide) heaters to prevent overheating.

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Part No.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

, Inlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital

supply button AR 4-4.5 IR VEX AW 8.5 to 13.1 6 15 AMR 6 37.5 52.7 67.8 75.3 77.8 100 AWM AWD ITV Replacement parts VBA Part No.

Tightening torque for set screws 0.7 to 0.8 Nm. 2 RX+ These devices comply with part 15 of the FCC Rules.