Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

5 Port Air Operated Valve Series VFA3000 1

2 position single: VFA5144SA VA SA (Mounting hole) (Pilot port) (Breathing port) VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR VH VHS (Piping port) ( ): Value for Rc 1/2 02 03 04 2 position double: VFA5244(Mounting hole) (Breathing port) (Pilot port) (

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Symbol LQ2 integral fitting Symbol 2 3 4 Body class 2 3 4 Orifice dia. 4 8 10 Port B (OUT) different dia. size LVH Metric sizes Symbol Nil Application Ports A & B same size 03 04 06 08 10 12 3 4 6 8 10 12 LVD Refer to the applicable tubing table to the right Different diameter tubings can be selected within the same body class.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Related Products: Multi-tube Holder TM Series

(mm) Model Model Accessory TM-04 TM-06 TM-08 2 x 6 TM-04 TM-06 TM-08 TM-10 TM-12 4 6 8 10 12 2.6 x 8 4 TM-10 3 x 8 TM-12 Dimensions: Multi-tube Holder N x D (Pitch) N x holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

VFA3000

closed center/exhaust center/pressure center: VFA5 44-X1 3 4 5 02 03 04 2 x M5 x 0.8 2 x 5.3 (6.5) (Breathing port) (Mounting hole) 2 x 18 (Pilot port) 5 x , , 38 14 12 SYA (Piping port) SYJA VZA ( ): Value for Rc 1/2 VFA VFRA VA 1771

FHG

Suction Guard FHG Series How to Order 0 A 04 0 0 M 074 FHG9 Port size Suction guard 1/2B 04 06 08 10 12 16 20 24 3/4B 1B Hydraulic fluid 1 1/4B Air breather Petroleum Water-glycol, Emulsion Phosphoric ester 0 1 2 1 1/2B Nil Air breather Cap 2B C 2 1/2B 3B Connection Port size category Nominal filtration 0 1 2 3 4 5 Companion flange Female threaded companion flange L-block companion flange

Digital Flow Switch for Water Series PF3W 3-color display ®

PF3W 5 04 03 1T Remote sensor unit Integrated display PF3W 7 04 03 AT M Type Made to Order 5 7 Remote sensor unit Integrated display Thread type X109 X128 X143 Seal material EPDM Nil N F Rc NPT G Analog 4 to 20 mA 2 output type Note) Rated flow range (Flow range) Piping material brass Symbol Rated flow range Note) Applicable only for remote type with 04 20 40 11 21 0.5 to 4 L/min 2 to 16

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

99

{Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure

Speed Controller with Uni One-touch Fitting AS Series

AQ Elbow type Metric size 04 06 08 10 4 6 8 10 ASV AK Control type Meter-out Meter-in 0 1 VCHC Port size ASR ASQ U01 Uni Uni Uni U02 U03 1 8 1 4 3 8 With One-touch fitting 635

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-02 : E4-03 : E4-04 1 4 3 8 1 2 1 4 1 2 : E6-06 : E6-10 3 4 1 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) in the gauge part number (e.g.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500