Miniature Guide Rod Cylinder Series MGJ

5 e !1 No.

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

Series AK1000

However under Japanese regulation, only MPa is available in Japan. 4PL 5PC e e qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1002 1 to 30 psig (0.007 to 0.2 MPa) AK1006 2 to 60 psig (0.014 to 0.4 MPa) AK1010 2 to 100 psig (0.014 to 0.7 MPa) AK1015 5 to 150 psig (0.034 to 1.0 MPa) AK1020 5 to 200 psig (0.034 to 1.4 MPa) AK1030 5 to 300 psig

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

Rotary Table

P391060-5 P391070-5 Seal kit No.

Low-Speed Rotary Actuator

Load Rotary actuator Flexible coupling Bearing Fig.4 -24- Unit used as flange mount Figure 5 and Table 5 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 5 (mm) Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 Bolt 40 28.5 M 8 Rotating range examples Fig.5 Fig.6 shows piping ports of the rotary actuator.

MHx-OMZ0005

M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

SI unit for PROFIBUS DP

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

Series MLGP

- 5.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 Rolled steel Rod end nut #5 e.

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

VCA

LVQ Rc G NPT NPTF Nil F N T Series LQ 3 4 Class 3 Class 4 LVN Port size (OUT) Valve type TI/ TIL Size 3/8 (10A) 1/2 (15A) Class 3 Symbol 03 04 06 Class 4 5 N.C. for manifold PA Fluid 3/4 (20A) General air Dry air Nil A PAX Orifice size Orifice size (mm) 4 5 7 10 Class 3 Class 4 Symbol 4 5 7 10 PB Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Manual override

VVXA21/22

5"5 6"( % " 7 1 ' % 8 6 4 # " 5 " " 0 5 9 9 ' 9 ' * 9 $ # " 5 Indivisual SUP type (N.C.) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Base and Applicable Valve Part No. (N.O.) 4 " ! : 5 " " !"

NAR Series

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a

125

V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 2.5(0.5) 7.5 MGG Factors in parentheses are

Low Profile Slide Table Series MXF

5 u !7 q !

AC Servo Motor Driver (SSCNET Type)

2.86 20 10 5 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-III type)

LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.