Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 D-F5m D-F5mW

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.8 1.8 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 10 1 8 21.5 1 8 Heating capacity3 kW 1.5 1 4.0 1 Temperature stability

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 10 15 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

Title not found

1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16 NPT 1/8 NPT 10-32 1/16 NPT 10-32 10-32 10-32 D Height 3/4 1/2 1/2 1/2 3/4 3/4 9/16 9/16 17/32 17/32 1/2 Part # RB 1/4-10 RB 1/4-10 Short RB 1/4-1/16 Short RB 1/4-1/8 short RB 1/4-1/16 RB 1/4-1/8 RB 1/8-10 RB 1/8-1/16 RB 1/16-10 RB 428-10 RBB3/8-10 72 Caps & Swivel Nipple Swivel

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

High Vacuum Angle Valve, XL Series

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

Slide Unit Series CX2/CXWM/CXWL

Table (4) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material M L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L CDBXW 10M1 1 1 Magnet mounting block assembly Aluminum alloy 1 1 1 1 1 Aluminum alloy 1 Switch mounting rail Spacer Aluminum

Slide Unit Series CX2/CXWM/CXWL

Table (4) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material M L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L CDBXW 10M1 1 1 Magnet mounting block assembly Aluminum alloy 1 1 1 1 1 Aluminum alloy 1 Switch mounting rail Spacer Aluminum

CQS

25 Note) 2 15 Note) 5 10 1.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Low Friction Cylinders Series MQ

79 10 10 ( 9.8) 40 12 55 52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13 16 (15.8) 52 17.5 Rc 1/8 NPT 1/8 G 1/8 57 71 69 10 7 10 5 14 12 40 5.5 9 40 10 to 50, 75, 100 116 M8 x 1.25 M8 x 1.25 104 13 16 (15.8) 64 17.5 Rc 1/4 NPT 1/4

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,

Hygienic Design Cylinder Series HY

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Resin 1 10 Bumper A Resin 1 11 Bumper B 1 Stainless steel+NBR (FKM can be selected.) 12 Scraper (Piston rod) 2 Stainless steel+NBR (FKM can be selected.) 13 Scraper (Guide rod) 3 Stainless steel (Over 32: 2 plugs and 1 hexagon bolt) 14 Hexagon bolt 1 NBR (FKM can be selected.) 15 Rod seal Caution 1 NBR 16

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

Step Motor Driver （ Pulse input type ）

mode 1 1 1 1 ORIG limit 100 100 100 100 ORIG time 100 100 100 100 ORIG speed 10 10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD

Cylinder with Lock

to 750 45 to 750 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 50 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

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(Including r and t) Manifold Block Assembly SQ Replacement Parts VFS VVQ5000 1 No. Part no. Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows