25

Diaphragm Assembled in a clean room.

High Vacuum L Type Valve

nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-

Unit Manifold Valve

Bracket mount Panel mount Barb fitting 4/2.5 One-touch fitting 2 Bracket Panel mount example Lead wire length In case of 8 stations 1(P) 3(R) 2(A) 2(A) Connector cable Length: 300 mm 600 mm 1000 mm No.7 No.8 2(A) 2(A) No.5 No.6 2(A) 2(A) No.3 No.4 2(A) 2(A) No.1 No.2 Reduced environmental impact substance RoHS compliant Features 1 Unit Manifold Valve Compact Direct Operated 3 Port Solenoid

CG5 mounting brackets , Type: flange, foot, trunnion bracket , Applicable to all bore sizes, CYL, D, B, A, 20, RC, R, XA12M, WATER RESISTANT CYLINDER, 341, 0.47300 lb

CG5 mounting brackets , Type: flange, foot, trunnion bracket , Applicable to all bore sizes, CYL, D, B, A, 25, RC, V, XA11, WATER RESISTANT CYLINDER, 341, 0.65600 lb

Non-rotating and double rod are standard options.Single acting, single rod, spring return/extend, Rubber seal, Bores size: 20mm *, 25mm *, 32mm *, 40mm *, Auto switch capable, Variety of lead wires and prewired connectors, CYL, -, B, A, 25, TN, ROD END CHANGE, ROUND BODY CYLINDER, E18, 0.38400 lb

Solid State Auto Switch

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

ATX-OM-F004E

Grounding should never be connected to a water line, gas line or lightning rod. Multiple wiring is dangerous because it may lead to heat generation and cause a fire.

Precision Regulator

Note1) Both options B and H cannot be included in one part number. Note1) The bracket for IR3000 series is not compatibile with IR3000-A series Note 2) See pressure unit table below.

PAB-OM-O003

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 12 How to Order P B 1 3 1 3 A S Female thread / Tube extension P B 1 3 1 3 A S With nut Port size Material of diaphragm Symbol Main fluid Pilot air Symbol Material of diaphragm connection size connection size Female thread 1 PTFE 01 Rc 1/8 N01 NPT 1/8 F01 G 1/8 Actuation Tube extension Symbol

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

α PneuAlpha HARDWARE MANUAL

HOUR METER 19 Records the accumulated time an Output or Input signal has been ON SCHMITT TRIGGER 19 Turn an Input On at the High Value and Off at the Low Value (or vice versa) ZONE COMPARE 20 Compare a value to a range of values (Analog, Direct Set, or FB values) DISPLAY * Display Messages or Data on the LCD display OFFSET GAIN 22 Manipulate Analog Values; y = A/B*x + C; Set High and Low

DOC1003077

Keep this manual in a safe place for future reference. These instructions indicate the level of potential hazard by label of Year 2022 2023 2024 2025 2026 2027 . Do not use devices that generate electromagnetic radiation such as *Cooling capacity decrease approx. 20W when high pressure pump option selected Month A B C D E F .

Precision Regulator

Note1) Both options B and H cannot be included in one part number. Note1) The bracket for IR2000 series is not compatibile with IR2000-A series Note 2) See pressure unit table below.

Precision Regulator

Note*) Both options B and H cannot be included in one part number. Note*) The bracket for IR1000 series is not compatibile with IR1000-A series Note 2) See pressure unit table below.

PF2D

Avoid especially the application of pressure above specifications through a water hammer. a) Use a device such as a water hammer relief valve to slow the valves closing speed. b) Absorb impact pressure by using an accumulator or elastic piping material such as a rubber hose. c) Keep the piping length as short as possible. 7.

HEC-OM-Y008

Keep this manual in a safe place for future reference.

ITV

Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

Clean Gas Filter

2) SFA102SFA202SFA302 Connection Model (A) (B) SFA102-02 Tube 89 76 TSJ1/4 SFA202-02 Swage 93 96 SFA302-02 Joint 101 120 ()Reference dimensions 3) SFA103SFA203SFA303 Connection Model (A) (B) SFA103-02 Union 117 76 UOJ1/4 SFA203-02 O Ring 122 96 SFA303-02 Joint 130 120 ()Reference dimensions -8- 3.