101 kPa10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessEnclosureOperating temperature rangeOperating humidity rangeVibration resistanceImpact resistance?3% F.S. or less1000 VAC for 1 min.

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

10Max. 14MPaFH540-10FH541-101 1/432 (1 1/4B)120

ModelPort size Note)Rated flow rate (l/min) INLETOUTLETFH990-101 1/2B1 1/4B150

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

Compact Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LQ printing NS 12200SZ Printed in Japan.

Pressure Switch/Reed Switch Type

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OT printing OT 7150SZ Printed in Japan. D-KS

Refrigerated Thermo-chiller

Min. 0.5s 1s 2s 0.05s 0.1s 0.2s 0.01s 0.02s 100 200 400 600 1000 2000 4000 130 300 500 700 1500 3000 Current (% for chiller main breaker volume) 101 Series HRZ Specific Product Precautions 3 Be sure to read this before handling. Refer to back pages 1 and 2 for Safety Instructions and back pages 3 to 6 for Temperature Control Equipment Precautions.

Step Motor Controller (Servo / 24 VDC)

trouble Addition/Timing chart No.LEC-OM00605 Apr/2012 Revision Addition to notes about UL recognition No.LEC-OM00606 Jan/2014 Revision Addition/Troubleshooting No.LEC-OM00607 Jan/2015 Revision Addition/EMG signal Instructions No.LEC-OM00608 May/2015 Revision Addition/ Step no. table Addition/Troubleshooting No.JXC-OMT0011-A Oct/2018 Complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101