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Bad characteristic Plugged restrictor Disassemble and clean Deformed diaphragm Replace diaphragm -9- No.IL01-OM06-C -10- No.IL01-OM06-C -11- No.IL01-OM06-C Safety instructions update Drawings update Spare parts list, Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject

Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

. * If the product has failed, then please return the valve as it is. 12 No.VT325-OMK0002-B Revision history AE A Renewal PS A BE A Renewal WQ 1st printing: KS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

(See Fig.13) Replacement part: Shock absorber Bore size Part no. 32 RB1007-X225 4050 RB1407-X552 Lever Hexagon socket head set screw Push down Fig. 11 10 - Lever Shock absorber 11.Internal construction 12 16 Push down Replacement Grease applied Approx.5mm Fig. 12 Fig.13 20 11 - 32&50 Component Parts (12&50) 12 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81

SYJ500*-OMJ0001-A -- Revision history A Safety Instructions oP 1st printing : Jy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.SYJ500-OMJ0001-A

[July 2017] F: Revision [February 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2019 SMC Corporation All Rights Reserved No.EX-OME0004-F

B: Fluid N2 add Specifications: Note 3) add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Description Material 1 Body C3604, C3771 2 Union nut C3604 Resin sleeve, plug Nylon 66 Brass sleeve C2700 3 11 Revision history A -: Fluid N2 Turbine oil class1 (ISO VG32) add SpecificationsNote 3,4,5) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ300-OMO0002-A Revision history A Added the SYJA3000 SS 1st printing PP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

Revision history A: Tube connection type added Precautions change B: Fixed failure countermeasures 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

) SI (24SOL) EX600-SDN(A) EX600-SPR(A) EX600-SMJ EX600-SEN EX600-SEC EX600-SPN SI unit (Occupies 32 outputs) SI (32SOL) -52No.EX-OML0011-C Specifications Model EX600-HT1-A Communication type RS232C Communication speed 9600 bps Power supply 24 VDC is supplied from the SI unit Current consumption 50 mA or more Display LCD with back light Resolution 128x64 dot Connector (Handheld Terminal) 14

Description Maintenance/Service Work Description Date IDU Series 13-1 Service Record 131 Revision BSep.2022 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2022 SMC Corporation All Rights

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 No. 100-OMV0001 S Revision history 1st Printing :WQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

to condensate when the air temperature becomes lower than this temperature. 10.3 Power Supply Cable Table 10-2 Power Supply Cable Description Specifications Connector Rating Voltage: 250V Rating Current: 10A Cable Rating Voltage: 300V AWG14 Do not use the included power supply cable for any purposes other than connection to this product. 10-2 HEC002-A/HEC006-A Revision Rev.1.7Mar.2020 4-14

. -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -11-

Resin 2 to 3 Rc1/4 Metal 12 to 14 Deteriorated oil discharged from compressor Dust sucked from ambient air Warning Moisture (drain) 1. Operation Manual Installation 2. Flushing Mounting Selection Piping

ring NBR 1 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14

. -3- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved