Process Pump Series PA3000/5000/PAX1000 Series PB1000

Specifications FLUID OUT AIR SUP AIR EXH Model PB1011 PB1013 1/8 Main fluid suction/discharge port 1/8 Supply port Port size Pilot air FLUID IN M5 x 0.8 (10 32 NOMINAL) Exhaust port Air operated type Polypropylene PP, Stainless steel (SUS316) Fluid contact areas PTFE Diaphragm Material PTFE Check valve FKM Liquid contact seals Discharge rate 8 to 2000ml/min (0.3 to 70.6SCFM) 8 to 500ml/min

VZ1000

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 Symbol C3 C4 C6 M5 CM Ports 1, 3, 5 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads Mixed size/with port plug Top ported elbow 3.2 One-touch fitting Top ported elbow 4 One-touch fitting Top ported elbow 6 One-touch fitting M5 threads Bottom ported elbow 3.2 One-touch fitting Bottom ported elbow 4 One-touch fitting Bottom ported

Modular F.R.L. Units

Note 6) Refer to Chemical data on page 32 for chemical resistance of the bowl. Note 7) Standard material (polycarbonate) Note 8) Without a valve function. Note 9) For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Formula

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Appropriate clamping torque (Nm) 0.18 to 0.25 1.13-3 4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order L 1 5 5 VQD11 Body Sub-plate port size 2 3 5 M5 thread Without sub-plate (Manifold) M5 thread Body ported Body ported (Single unit) Body ported (Manifold) Base mounted M5 Base mounted M5 Valve option Electrical entry Standard (2W) Vacuum (2W) Large flow (4W) Large

3 Port Air Operated Valve

) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 1561 VPA300/500/700 Series VPA700 Series/Body Ported/Dimensions Standard/VPA742-1(-F) 03 04 A B 3/8, 1/2 2(A) port

SYJA700 Series

Kyodo turbine 32 Tightening torque Kygnus Oil Co. Turbine Oil 32 When installing fittings, etc., follow the procedures below. M5 M5 M5 M5 Kyushu Oil Co. Stork turbine 32 Showa Shell Sekiyu K.K. Turbine 32 1)When using SMCs fitting, etc. After tightening by hand, give it additional 1/6 turn with a wrench. (1/4 turn for miniature fittings.)

Rotary Gripper Series MRHQ

screw attachment ) 6 12 30.4 Max. 14 4-M8 x 1.25 Depth 12 (two on opposite side) 63 24 M5 x 0.8 3-R3 2 4 Finger opening port 17 32 23 27.5 7 11 45 42 69 8 54 2-8.5 through 2-14 depth of counter bore 14 107 Angle adjustment bolt 3-R3 12 3-6H9 depth 8 (one each on three sides) +0.030 0 10 3-6H9 long groove depth 4 (one each on three sides) +0.030 0 M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 0.062

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

MRHQ

closed 0 -0.8 6 12 25 30.4 Max. 14 4-M8 x 1.25 depth 12 (two on opposite side) 63 24 M5 x 0.8 Finger opening port 3-R3 2 4 17 32 23 27.5 7 11 45 42 69 8 Angle adjustment bolt 54 2-8.5 through 2-14 depth of counter bore 4 107 3-R3 +0.030 0 3-6H9 depth 8 (one each on three sides) 12 10 +0.030 0 3-6H9 long groove depth 4 (one each on three sides) M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 -0.062

Rotary Gripper Series MRHQ

MRHQ Dimensions MRHQ25 A 70 58 B 93 4 x M6 x 1 depth 10 47 64 66h9 0 0.074 33.3 opened +2.5 0.2 0 0.1 10 12 0 0.06 M5 x 0.8 Finger closing port 0 0.8 19.3 closed 4 x M5 x 0.8 (attachment mounting screw ) 6 12 25 30.4 Max. 14 63 4 x M8 x 1.25 depth 12 (two on opposite side) 24 M5 x 0.8 Finger opening port 2 4 MHZ 17 32 23 27.5 7 11 45 MHF 42 69 MHL 8 Angle adjustment bolt 54 2 x 8.5 through

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

16 32 16 32 16 32 16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12

E-MY2B_E_A

Front view Mounting holes on the top Mounting holes Theread size Name Type Mounting hole Main body M5 Side Support A Mounting hole M5 Side Support B Mounting Tap M6 x1 Side support A Side support B MY-S25A MY-S25B Mounting holes Mounting taps Installation of work Use 4 threaded holes on the top of slider for installation of work.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.