PSxx-OMF0005CN

0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 ()

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Membrane Dyer Series IDG Standard specifications/Single style (standard dew point 20C) Model Standard dew point 20C IDG5 IDG10 IDG20 IDG30 IDG50 Fluid Compressed air Macromolecular membrane dryers that act like filters Range of operating conditions Standard performance conditions Inlet air pressure MPa 0.3 to 0.85 0.3 to 1.0 Inlet air temperature C Note 1) 5 to 55 Ambient temperature C 5

3 Position Cylinder Series RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Note 5) Consult P/A regarding drip-proof specifications (equivalent to IP54) .

KF

5 4 9.4 Applicable tubing 16.2 14 17 20.5 12 27.2 8 5 14 6 17 6.5 5.5 18 22 10 18.8 14 17 19 28.8 21.5 Connection thread 17 7.5 6.5 25 22 17 7 30 8 22 12 19.3 17 19 22 30.3 23.5 17 8 38 9 22 Reference dimensions after R thread installation. 15-2-52

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Switch Pressure range 0.1 MPa 0 2 MPa 10 MPa 1 MPa 5 MPa ISE70 For 1 MPa (For air and general fluids) 0 0.105 MPa 1 MPa 1.05 MPa ISE70G 0 0.105 MPa 1.6 MPa For 1.6 MPa (For air) ISE71 1.68 MPa 0 0.105 MPa 2 MPa For 2 MPa (For general fluids) ISE75G 2.1 MPa 0 0.25 MPa 5 MPa For 5 MPa (For general fluids) ISE76G 5.25 MPa 0 0.50 MPa 10 MPa For 10 MPa (For general fluids) ISE77G 10.5 MPa Rated

48

Stroke can be modified in 5 mm increments. Part no.

One-touch Fittings

Tubing size Tensile force of tubing [N] 2, 3.2, 1/8" 5 4, 5/32", 3/16" 8 6, 1/4" 12 8, 5/16" 20 10, 3/8" 30 12, 1/2" 35 16 50 2) Removal of tubing (1) Push the release button flange evenly and sufficiently to release the tube. Do not push in the tubing before pressing the release button. (2) Pull out the tubing while keeping the release button depressed.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

side: Same) 7 5 8 8.5 35 8 2 x M3 x 0.5 thread depth 5 4 (20) (Z) 2 x M4 x 0.7 thread depth 7 6 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

VK3000

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.

Voltage Monitor for PFMV5

External input does not operate No reaction to the external input For external inputs, the white wire should be connected to GND for 5 ms or more.

Return Filter

Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance (Refer to 6. Maintenance parts (5) Maintenance When installing, allow sufficient space for maintenance. When installing, allow sufficient space for maintenance.

Cylinder with lock

Grease on the groove Grease on the outer circumference A little less than 1 mm L= Stroke 1 2 or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 18 Position for application of grease Grease application amount Unit: g Stroke 32 40 50 63 80 100 Positions for Bore size application of grease At 100st 3~4 3~4 3~5 4~5 6 ~ 8 8 ~ 1 0 50st added 1 1 1 1.5 2 3 39 - 4-4-4.

JXCx-OMT0034CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

Digital Flow Switch (Integrated display type)

1 to 5 V) Current output (4 to 20 mA) Load impedance Impedance Output impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Analogue output approx. 1 k Accuracy 5%F.S. max.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

N9:With one-touch fitting for 5/16 (Gasket 10 is supplied as an accessory.)

Air cylinder

Mounting, Operation P.12 1) Operating air P.12 2) Precaution on design P.12 3) Mounting P.14 4) Operating environment P.15 5) Piping P.16 6) Cushion P.17 7) Speed control P.18 8) Direction control P.19 4. Maintenance P.20 1) Inspection P.20 2) Overhaul P.21 3) Disassembly P.22 4) Assembly P.23 5) Expendable supplies P.24 6) Replacement procedure of seal P.25 7) Inspection P.26 5.

1.63

Note 1) 5 D-M9 10 2 pcs. 5 Note 2) 1 pc.