Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

Symbol fl:] w 8$ Flow Characteristics NAN200 900 Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

VH Series, 4 Way Hand Valve

MPa 1.0 1.0 1.0 1.0 1.0 1.0 Supply pressure MPa 0.9 0.9 0.9 0.7 0.8 0.9 0.6 0.7 0.8 0.9 0.9 Valve output pressure MPa Valve output pressure MPa Valve output pressure MPa Valve output pressure MPa 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 2000 4000 6000 0 0 0 200

Precision Clean Regulator Series SRP

C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Air Cylinder: Standard Type Double Acting, Single Rod Series NCG/CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Mounting style Front trunnion style Rear trunnion style Double Clevis style Front nose mount Basic style Single clevis Axial foot style Front flange style Rear flange style U T D N B C L F G Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Nose mount with air cushion is not available in 20 and 25mm.

Body Size: 2000, Thread: Rc, Port Size: 02 (1/4), Option: S (Silencer), Voltage: 2 (200 VAC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 2000, Thread: Rc, Port Size: 02 (1/4), Option: None, Voltage: 2 (200 VAC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Flow Direction: Left to Right

Flow Sensor Series PFMV

Front protective cover D Note Description Part no. Mounting screw (M3 x 8 l) Power supply / Output connector (2 m) ZS-28-A Bracket ZS-28-B With M3 x 5 l (2 pcs.) Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

5%200 mA or less (GW unit)64 points (16 points x 4 branches)The EX500 series input unit manifold (connection from communication port A to D)24 VDCMax. 2.8 A (Max. 0.7 A per branch)64 points (16 points x 4 branches)The EX500 series SI unit manifold (connection from communication port A to D)24 VDCMax. 3.0 A (Max. 0.75 A per branch)5 m or less between connected devices (total extension 10 m

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Low Friction: Q (Low Friction), Tube Material: Aluminum Tube, Bore Size: Ø63, Port Thread: TN (NPT), Stroke: 600mm, Low Friction Direction: F (Head Side at Pressure), Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Low Friction: Q (Low Friction), Tube Material: Aluminum Tube, Bore Size: Ø100, Port Thread: Rc, Stroke: 250mm, Low Friction Direction: F (Head Side at Pressure), Auto Switch: A44C--Reed, DC Volt >5 <24, AC Volt <200, LED, Connector

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Low Friction: Q (Low Friction), Tube Material: Aluminum Tube, Bore Size: Ø100, Port Thread: Rc, Stroke: 250mm, Low Friction Direction: F (Head Side at Pressure), Auto Switch: A44C--Reed, DC Volt >5 <24, AC Volt <200, LED, Connector, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 3

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Low Friction: Q (Low Friction), Tube Material: Aluminum Tube, Bore Size: Ø100, Port Thread: Rc, Stroke: 300mm, Low Friction Direction: F (Head Side at Pressure), Auto Switch: A44C--Reed, DC Volt >5 <24, AC Volt <200, LED, Connector

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in)

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

How to Order: LECP7 N 1 XB3 Dimensions Screw mountingLECP7***-*-XB3 DIN rail mountingLECP7**D-*-XB3 (2 ) (4 ) (1 ) (3 ) (1) Parallel I/O type (3) Option N NPN Nil Screw mounting P PNP D DIN rail mounting (2) I/O cable length (4) Actuator part number Nil Without cable Part number except cable specifications and actuator options Example : Enter LEFS16B-100B-R1 1 1.5m 3 3m for theLECP7**-LEFS16B

Silencer Metal Case Type Series 25

64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 0.05 0.02 0.01 0.005 0.002 Construction/Parts/Dimensions 50 100 200 500 1000 2000 5000 10 20 Port size Air flow (l/min (ANR)) Case (ZDC) Noise Level (Initial conditions) Hexagonal flats D (2507-006: Width

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Size/Valve Type: 3 (10A, N.C.), Body/Port/Orifice: D (Body Material: Stainless Steel; Port Size: 3/8; Orifice Dia.: 10), Voltage/Electrical Entry: D (200 VAC, Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)