MGG

Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 6 (Slide bearing type) 5 Deflection Y (mm) 800st 4 700st 600st 3 500st 2 300st 400st st: Stroke (mm) 1 200st 100st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000st 5 900st 4 800st 700st 3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40

Table of Contents

One-touch fitting for 4 One-touch fitting for 6 DIN rail mounting style (For manifold) Name plate D N Note) When two or more symbols are specified, indicate them alphabetically.

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

CRBU

R73CZ : N Ex.)

LEC-OM07605CN

BAT6V1SET (38.5) 4 0.8 [kg] M5 3.24 [N m] CNP1 CNP2 CNP 3 L1 P+ U (40) 2-M5 6 C D V L2 (6) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 2 9

VZS

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (Pitch) (A port) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) Manual override (Non-locking) 2-M5 X 0.8 2-M5 X 0.8 (External pilot port) (External pilot port) 69.5 [76] 57.1 50.5 35 8.5 (P/R port) 4-Rc (PT)1/4 63.5 69.5 [76] 63.5 63.5 30.5 30.5 A A 14 21.5 14 21.5 (Pitch) 22.5 9.5 6 6 n-Rc (PT)1/8

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

EXxx-OMY0004

Fig. 10-8 Retaining Screws O N O N 1 2 1 2 3 4 5 6 SW3 SW2 Fig. 10-9 SW3 and SW2 DIP switches When the DIP-Switches have been set ensure the M12 connector block and all retaining screws are refitted.

TABLE OF CONTENTS

HOLES #6-32 UNC THD x .23 (5.8) DEEP 2 PLACES AS SHOWN. .50 .75 (19.1) DIA. Body stainless steel or brass Seals Nitrile (Buna N) Standard. FKM EPDM Optional.

HEC_001W-E

I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.

CATALOG VC10

HOLES #6-32 UNC THD x .23 (5.8) DEEP 2 PLACES AS SHOWN. .50 .75 (19.1) DIA. Body stainless steel or brass Seals Nitrile (Buna N) Standard. FKM EPDM Optional.

Digital Flow Switches

Note 6) When the current output is selected.

EXxx-OMY0006CN

DIP (2 6 ) DIP SW2:2 SW3:6 M12 SW3 DIP DIP =0.6Nm SI M12 Fig. 10-8 O N O N 1 2 1 2 3 4 5 6 SW3 SW2 Fig. 10-9 SW3 and SW2 DIP switches DIP SI DIP SI 66 No.EX##-OMY0006CN 10.11.2.1. SW2 10.11.2.2.

90

exhaust (EXH) port 2 n x Vacuum (V) port (Built-in suction filter) n x Individual exhaust (EXH) port 3 3.5 10.5 15 33 (n1) x 15 (mm) Number of stations Port type Hexagon width across flats B A D C 1 2 3 4 5 6 7 8 9 10 06 08 07 09 9.7 12.3 8.3 11.4 10.8 11.4 8.7 11.3 4 6 4.76 6 Metric size L1 L2 L3 L4 L5 L6 30 45 56.8 73.5 75 85.5 45 60 71.8 88.5 100 110.5 60 75 86.8 103.5 112.5 123 75

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0 20

MGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

3 Port Air Operated Valve Series SYJA300

1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155

0.55

n: Stations L n 42.3 2 3 4 5 6 7 8 9 10 11 12 13 14 (Lead wire length) L1 L2 74.5 64.5 102 92 129.5 119.5 157 147 184.5 174.5 212 202 239.5 229.5 267 257 294.5 284.5 322 312 349.5 339.5 377 367 404.5 394.5 Approx. 300 L n 15 16 17 18 19 20 L1 L2 432 422 459.5 449.5 487 477 514.5 504.5 542 532 569.5 559.5 Unless otherwise indicated, dimensions are the same as Grommet (G).

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N