Piping: Base Mounted: Side Ported, Stations & Port Location: 14 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 15 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 5 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 8 Stations (Type 20, 41, 42, 43), A, B Port: Base Mounted G1/8, Type 42

Digital Pressure Switch

[Measurement mode] 22 Pressure Setting 23 3 Step Setting Mode 24 Simple Setting Mode 26 Function Selection Mode 28 Function selection mode 28 Default setting 28 F 0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42

Digital Pressure Switch

Wiring 20 Outline of Settings [Measurement mode] 23 Pressure Setting 24 3 Step Setting Mode 25 Simple Setting Mode 27 Function Selection Mode 29 Function selection mode 29 Default setting 29 F 0 Units selection function 31 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 5 FUNC terminal setting 40 F 6 Fine adjustment of display value 42

Digital Pressure Switch

Measurement mode] 20 Pressure Setting 21 3 Step Setting Mode 22 Simple Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 41 F80 Power saving mode 42

Fieldbus system Digital unit

Installation 12 Installation 12 Wiring 14 Digital input unit Model Indication and How to Order 17 Names and Functions of Product 17 Mounting and Installation 20 Wiring 20 LED Display 25 Specification 28 Specifications 28 Dimensions 31 Digital output unit Model Indication and How to Order 34 Names and Functions of Product 34 Mounting and Installation 36 Wiring 36 LED Display 40 Specification 42

High-precision Digital Pressure Switch

Setting 19 3-Step Setting Mode 20 Simple Setting Mode 22 Function Selection Mode 24 Function selection mode 24 Default setting 24 F 0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Except in the case of the single numeric parameter) PLC Touch panel Function that can be executed in each mode Mode setting Single numeric parameter Half numeric parameters Full numeric parameters Number of definable numerical data items 1 6 12 Number of occupied stations 1 2 4 Max. number of connectable controllers 42 32 16 Step no. defining operation v Numerical data defining operation

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42

LJ1H

A B C D 41 42 Standard Motor 200W Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 20mm/10mm lead Vertical Mount How to Order Stroke LJ1H303 NA 1 K F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

ChemicalThermo-con

5.7 (145) 5.2 (132) Fan 1.3 (32) 17.6 (447) 0.8 (20) 7.4 (187) 6.5 (165) Display panel 8.7 (222) HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products AL SI OUT 7.4 (189) COMMUNICATION ALARM 7.0 (177) 5.9 (149) 1.7 (44) CHEMICAL 4.3 (109) 8.46 (215) Fluid leak sensor PURGE OUT IN PURGE FG B B A FG + EXT.SENSOR REMOTE ON/OFF POWER I N O N IN WATER WATER SIGNAL DC OUT AC 1.65 (42

53

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

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Standard Strokes Accessories (Option) Description Series CK1A _ Series CKl B Bore (mm) Standard strokes (mm) 40 50, 75, 100, 125, 150 Single knuckle joint CKA4D-17-101 A CKB4D-17-102A 50 50,75, 100, 125, 150 Double knuckle joint(With pin and split pin) CKA40-18 -206A CKB40-1 8-207A 63 50, 75, 100, 125, 150 Li mit switch mount CKM040-48-1 5070A Cam CKM040-42-1 5070 For 75 stroke CKA40-40-

Pin Clamp Cylinders

.: 11.5 or more) 490.1 5 CK1 (6.4) 590.05 CLK2 2 x 6H7 through +0.012 0 CLKG (216) 17.5 50.5 7 4 x 6.6 through 59 CKQ CLKQ Rc1/8 Unlocking port 57.5 42 15.5 Clamp arm position CK CLK CK CLK A Same as the port side B Opposite side of the port Dustproof cover 2 x Rc1/8 CKQ Arm A B Port 68 5.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

60 D 67 83 101 B C 36 52 70 A MHL2-10D MHL2-10D1 MHL2-10D2 11221122112296 124 162 38 54 72 MHL2-16D 1122A B C +0.025 3H9 0 depth 3 D 2 x M5 x 0.8 thread depth 7 (Mounting thread) 10 2 x 5.5 through (Hole for mounting body) 42 When closed E When closed J 4 x M5 x 0.8 thread depth 10 (Mounting thread) 4 +0.025 3H9 0 depth 3 K cross view (Closed) +0.052 23H9 0 depth 1.5 Auto switch mounting

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

0.5 thread depth 6 (A, B common view) Vacuum suction port 31 Auto switch mounting groove 2 x 4.2 0 9h9-0.036 4.7 1 9.6 2-3 4.7 3 10 19 (35) 32 8 15.5 2 2 8-0.05 0 3-0.02 0 3-0.02 0 13.4 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 12 12 4 4 4 4 934 Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-15R 1122B 1122MHR2-15E port location 44 42