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Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

position Retracted end Bore size 6, 10, 15, 20 to 32 Locking position Both ends Bore size 10, 16 to 32 Series MTS Series MXS Series MXQ Series MY1H Locking position Retracted end Bore size 12, 16 to 40 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Retracted end Bore size 8, 12, 16 to 25 Locking position Both ends Bore size 16 to 40 6 8 10 12 15 16 20 25 32 40

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: -, Lock Nut: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 90°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø5/32", Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 0°, Thread: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø5/32", Seal: -

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 270°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 180°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 270°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 180°, Made-to-order specifications: None

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1, Sealing Method: Gasket Seal, Indicator window direction: 270°, Made-to-order specifications: None

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Refer to Flow Characteristics (page 14-20-32) and figure of Max. Air Flow (page 14-20-30).

Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007

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