HRX-OM-R039

Fig. 8.4-1 Cooling capacity(HRSE012-A-10) 8.4.2 HRSE018-A-10-(T) 2000 2000 Ambient Ambient Temperature Temperature 25 25 1500 Cooling capacity[W] 1500 Cooling capacity[W] 35 35 1000 1000 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 100W when option: T is selected.

Compact Electric Actuator Series LG1

-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions inside ( ) are for a 100mm stroke. 4 Series LG1H High Rigidity Direct Acting Guide Type LG1H20: Without Coupling

KT10

: 1000 psig (6.9 MPa) 11.0 1600 9.7 1400 Delivery pressure (MPa) Delivery pressure (psig) 8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1) Viton is a registered trademark of DuPont. 65 Process Gas Equipment / Regulator Specific Product Precautions Be sure to read before handling.

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 -52No.EX-OMS0026CN AD -3276732767 = 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD 1000 5000 (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -3276632767 10 5 5 20 20 -3276732766 0 1 0 0 4 /(E.O./W.S.) () E.O.

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

IR1000/2000/3000

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

A

ln/min** 1900 ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

MB1

Without air cushion Foot type/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2

MGG

200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Table of Contents

Series VQ0-1000-2000 Plug Lead Unit: Flip Type Body Ported. Specifications. VQ0-1000-2000 F Kit (D-sub connector) . VQ0-1000-2000 P Kit (Flat ribbon cable connector) . VQ0-1000-2000 T Kit (Terminal block) . VQ0-1000-2000 C Kit (Connector) . VQ0-1000-2000 S Kit (Serial transmission unit) . Series VQ1000 Body Ported Plug Lead Unit: Cassette Type. How to Order Manifold.

IR1000/2000/3000

400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Table of Contents

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

Precision Regulator Series IR1000/2000/3000

200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) 558 Precision Regulator Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Precision Regulator

0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

High Power Cylinder:

1500 32 REA 1000 1500 40 *It is possible in each size to manufacture the cylinder with 1500 stroke maximum.

Auto Switch Guide

Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Auto Switch Guide

Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data