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Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V: Female thread for bracket mounting Same as back side 8 locations Main port Bracket U: Long hole for mounting 4 positions Flow indicator for 2 port valve Dimensions (mm) Model Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6

Symbol Plate PEEK PEEK PEEK PFA PFA PFA Diaphragm EPDM FKM Kalrez (Symbol 1) IN (Symbol 3) OUT A B C E F G EPDM FKM Kalrez 115 3 Universal 3 1 2 1 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Specifications Body ported type Body ported type (Tubing type) Base mounted type Model LVM115 LVM14R LVM16R LVM13R LVM112 LVM12R LVM11R LVM11 Diaphragm type direct

Symbol Plate PEEK PEEK PEEK PFA PFA PFA Diaphragm EPDM FKM Kalrez (Symbol 1) IN (Symbol 3) OUT A B C E F G EPDM FKM Kalrez 115 3 Universal 3 1 2 1 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Specifications Body ported type Body ported type (Tubing type) Base mounted type Model LVM115 LVM14R LVM16R LVM13R LVM112 LVM12R LVM11R LVM11 Diaphragm type direct

If screwing without removing dust cover, dust cover might be broken. 3.To use a floating joint to connect the cylinder rod to a driven body, secure it in place by applying a torque that is appropriate for the thread size. Also, if there is a risk of loosening during operation, take measures to prevent loosening, such as using a locking pin or thread adhesive.

0.0 1 sm Or less Less ttran 100 pIticles O.3,rm or largEr per cuttc foot at ounet 4O-14O"F (5-60 C) colo. irdicator Eknern Pod srize 3/8, 1/2 NFI 1.98 lb6 (0.9 Ksf) *ats'.'pply presere o, mp6,9 Selcetim Clnrt Flow charactersistics i{AME250 r{AnE350 l{oub 8*ct ConditixsSuppt Frssr: 7OF3ig, Air Flo,v: 15 SCFM.

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

port) 2-Rc 1/8 (Pilot port) Main valve manual override (Direct manual) (Mounting hole) ( ): In the case of Rc 1/4 5-3-21 4 5 Port Air Operated Valve Series VFRA4000 How to Order 03 VFRA4 11 2 Thread type (Including pilot port) Function Nil Rc 2 position single 2 position double 1 2 3 4 3 position exhaust center F N T G NPT NPTF 3 position closed center Courtesy of Steven Engineering, Inc

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 T6 2.02 2.41 0.30 25 T7 3.77 4.37 5.77 0.40 -6- 1.2 LECY series driver 1.2.1 How to order L E S Y H 16 D V6 A 50 S 3 M2 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel LECYM2

Combination 1 2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol

3 !4 !7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

Confirmation of allowable rotary torque 3.

0 NBR Detent assembly AXT335-12-3 AXT335-12-3 AXT335-12-3 !1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.

3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.