2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) 10 is N.C.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

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and $rge With surge voltage Voltag Surge voltage suppressor of grommet type. ' Not aveil.lor grolnmel typo. t Spcial order 5;3 position pressure cenrer Pott size 10-32Nom, (M5 x0.8) ' Spedel Order.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

light and $rge With surge voltage Voltag Surge voltage suppressor of grommet type. ' Not aveil.lor grolnmel typo. t Spcial order 5;3 position pressure cenrer Pott size 10-32Nom, (M5 x0.8) ' Spedel Order.

PSxx-OMH0002CN

DC1224 V( 10) DC1224 V(10 ) 6 DC(+) DC(-) DC1224 V( 10) DC1224 V(10 ) 7 DC(+) DC(-) / / / ( ) 8 9 -30No.PS-OMH0002CN-D No. () / () / 10 2030 20 "-M" 11 ( ) "-M" SI MPa 12 13 -31No.PS-OMH0002CN-D No. / / 14 () / () 15 () ( ) () () -32No.PS-OMH0002CN-D OUT1 OUT2 80 mA 07F.S. 3 0 1 digit 0 -27-67 -33No.PS-OMH0002CN-D ISE70() ISE75() ISE75H() 01 MPa 010 MPa 015 MPa -0.11

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Air preparation filter

Part name (8) (7) (1) Body (2) Element (1) (3) Bowl (4) Auto drain (5) Flange (5) (6) Stopper (7) Element service indicator (8) Bracket (9) Drain port spacer (6) (10) Drain cock (2) (3) (4) (9) (10) Options and spare parts No.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

Modular Type Regulator Series AR

Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 66 Non-standard Motor/Vertical Mount Specification Series LJ1H10 Dimensions/LJ1H102PH(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 217 60 50 Z section 74 Stroke + 125 (table movement

Compressed Air Cleaning Filter Series

Q 26 R 4.5 S 1.6 AMG150C AMG250C AMG350C AMG450C AMG550C 10 99 63 20 63 10 1/8, 1/4 158 14 113 76 20 76 10 190 66 24 8 6 6 12 6 10 40 66 80 28 5 2 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 3/4, 1 259

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

LEC-T1_C

107 - 3 ON/OFF OFF OFF ON ON ON OFF OFF ON ON OFF OFF ON OFF OFF OFF PLC 108 - 7. / A 50mm ( ) 5m 5m 10% 15m 20% 109 - 8. / 8.1 () EMG / 110 - 1000 1 / UL,UL1310Class2 8.2 111 - 8.3 DC24VSVON a) b) c) d) e) D 100 112 - 8.4 1. 2. 3. 4. 5. 6. 7. 8. -106090% -106090 113 - 8.5 5 P5 8.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS] DC24V [BK RLS] EMG /LEC 114 - 9. 9.1 / 9.2 ON

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

If the cable length exceeds 5 m, the speed / pushing force will be reduced by a maximum of 10 % per 5m. (If cable length is 15 m: Maximum 20 % reduction.) [Transportation] Caution (1) Do not carry or swing the product by the motor or the cable 18 No.JXC-OMW1019-A 9. Electric actuators / Common precautions 9.1 Design and selection Warning (1) Be sure to read the Operation Manual.

Floating Joint

How to Order J S 32 10-125 Stainless steel type Applicable bore size (mm) Dust cover material Symbol Nil S Material Fluororubber Silicone rubber Symbol JS series Nominal thread size Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Precautions Applicable bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol 4-070 5-080 8-125 10-125 14-150 18-

RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

ChemicalThermo-con

(310) 0.4 (10) Circulating fluid inlet Purge outlet (M5) Power connector 0.67 (17) 4.6 (116) 0.28 (7) 78.7 (2000) 0.28 Power Cable (Accessory) (7) 15.7 (400) (0.4 (10)) 15.0 (380) 0.4 (10) Connector: IEC 60320 C13 or equivalent Cable: 14AWG, O.D. 8.4 3.9 (100) 0.24 (6) Circulating FluidTube Size Wire color Contents 0.79 (20) Heat exchanger model Circulating fluid tube size Black 1 180 to

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00