10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

MXQ

F 6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4

Modular Design with Uniform Body Style

1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated

XL

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA Singlephase Singleturn 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg

CG1

Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 13 17 17 19 27 27 32 41 24 29 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 14 12 14 18 25 30 32 40 50 26 31 38 47 58 72 89 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 2 2 2 2 2 2 3 3 12 12

Air Slide Table Series MXS

(Define 1 =0.) Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 1/4 = 0.25 1 = W/Wa Find the load factor of the load mass 1. 3-2 Load Factor of Static Moment Rolling Yawing M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3) Find the static moment M (Nm). Examine Mr. Mr = 1 x 9.8 (30 + 10)/1000 = 0.39 A6 = 10 Examine My.

Digital Flow Switches

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

MXS

rate a2 of static moment. a2=0.39/15.9=0.025 3-3 Load rate of kinetic moment Pitching Examine Mep (30+10) Mep=1/3 X 16.8 X 9.8 X =2.2 1000 We=4/100 X 10 X 420=16.8 A2=10 Meap=1 X 0.7 X 15.9=11.1 K=1 g=0.7 Mpmax=15.9 a3=2.2/11.1=0.20 (Ln+An) Me=1/3 We X 9.8 1000 Collision equivalence load We=dWV d: Dumper coeficient With urethane bumber (Standard) =4/100 With shock sbsorber=1/100 Corrected

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

M-E05-1-LQ1

Metric size 2 Note) 03 04 06 Note) 03 05 07 3 06 08 10 07 11 3 4 6 8 10 12 19 25 R Body class Inch size 1, 2 03 (1/8") 5, 6 19 (3/4") 6 25 (1") 4 10 12 11 13 Inch size 5 12 Note) 19 13 Note) 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 6 Note) 19 Note) 25 Note) 19 Note) 25 Note) Common to metric size/inch size. For details, refer to the table on the left.

ITV

IRV Port size Current type 0 to 20 mA DC (Sink type) 1 VEX 1 2 3 4 1/8 (1000 type) 1/4 (1000, 2000, 3000 type) 3/8 (2000, 3000 type) 1/2 (3000 type) 2 3 Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Thread type SRH Nil N T F Rc NPT NPTF G SRP SRF Rated pressure VCHR +10% Output pressure (MPa) Alarm detection range: Detects output pressure outside the 10% F.S. range.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

1.1

Quantity per 1 set HRG-FL001 310 430 10 1 HRG-FL005 645 440 10 1 HRG-FL010 440 880 10 1 (Large) 880 (Small) 330 (Large) 440 (Small) 440 (Large) 10 (Small) 10 (Large) 1 (Small) 2 HRG-FL015 30 Thermo-cooler Series HRG Dimensions [By-pass piping set] HRG-BP001 HRG-BP010 HRG-BP015 C A E HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products D Connection thread Note) B Connection thread

Fieldbus System

Digital Input Unit Page 9 Digital Output Unit Page 9 Digital Input/Output Unit Page 9 Analog Input Unit Page 10 Analog Output Unit Page 10 Analog Input/Output Unit Page 10 D side U side Blanking plate VVQ1000-10A-1 1 2 3 4 5 6 7 8 Valve stations I/O Unit stations 1 2 VV5QC11-08C6SD6Q2N2 1 set Manifold base part number * VQC1100N-51 2 sets Valve part number (Stations 1 to 2) *

Fieldbus system EtherNet/IP compatible SI Unit

Monitor over range 0: disable, 1: enable 2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 0: offset binary 1: signed magnitude 2: 2s complement 6..7 Data format Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA, 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W (mm) L2 L4 max Y Size (mm) E3= E1= Y= 10 5-( 8-Y) to (Y-1 ) X L1 L3 max Size 3 to 8 Y-1 10 L2= 9-(14-X) to (X-3) 15 6-( 2-Y) to (Y-1.5) 5 to 14 X-3 3 to 9 Y-1.5 L4= L1= L3= 15 10-(18-X) to (X-4) 20 7-(10-Y) to (Y-1.5) 8 to 18 X-4 3 to 10 Y-1.5 20 10-(20-X) to (X-4.5) 30 8-(13-Y) to (Y-2 ) 10 to 20 X-4.5 5 to 13 Y-2 X= 30 12-(22-X) to (X-5) 40 9-(15-Y) to (Y-4.5) 10