VFA3000

, , 38 14 12 (Piping port) ( ): Value for Rc 1/2 1770 Series VFA5000 5 Port Air Operated Valve Dimensions: Base Mounted 3 position closed center/exhaust center/pressure center: VFA5 44-X1 3 4 5 02 03 04 2 x M5 x 0.8 2 x 5.3 (6.5) (Breathing port) (Mounting hole) 2 x 18 (Pilot port) 5 x , , 38 14 12 SYA (Piping port) SYJA VZA ( ): Value for Rc 1/2 VFA VFRA VA 1771

ZCUK

F9BWV 2-wire Relay, PLC IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !

F/ISE

with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets

Quick Exhaust Valve Series AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554 Quick Exhaust Valve Series AQ Construction Specific Product Precautions AQ1500/1510 AQ2000/3000/5000 Be sure to read before handling.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Note 1) M5 size Note 2) Brass parts are all electroless nickel plated. Model Applicable tubing O.D. Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

Yes Relay, PLC 3-wire (NPN) 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) IC circuit 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) A96 5 V A93 A90 100 V Grommet IC circuit 100 V or less None B54 B64 (B54) (B64) 100 V, 200 V Yes Relay, PLC 12

17

x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

VQ20/30

1 2 3 5 6 9 (1) 100 VAC (50/60 Hz) 200 VAC 110 VAC 24 VDC 12 VDC Other LQ Valve Type (A) 2 N.C.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets

Quick Exhaust Valve Series AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

KQ2-G

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 3

Model: 41 (AC), Bar Length: 112 (1120mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage Power

Model: 41 (AC), Bar Length: 178 (1780mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 9L (ø5/16" Elbow), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 5 (5m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power

Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller