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TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

SI unit for CC-Link

EX180-SMJ3/5 is a remote I/O station (1 station occupied, 32 inputs/32 outputs). An example of when the SI unit station number is set to 01 is shown below.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod ange G Head ange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

Hydraulic Filters

indication switch (CB-H) Blanking cap Suction Filter with Case FH99 Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 502 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Air breezer Cap Suction Guard FHG Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 506 Differential

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

VCC

(colors) No 3 port valves used 2 pcs. (colors) 4 pcs. (colors) Note) Maximum mountable valve number: 40 pcs. (in total of 2 port and 3 port valves) Circuit example 2 port valve 3 port valve 2 port valve 1 pc. 3 pcs. 5 pcs. 1 pc. 3 pcs. 5 pcs. RETURN RETURN RETURN 3 port valve IN IN IN IN PA PA PA PA IN PA IN PA OUT 2 pcs. 4 pcs. 6 pcs. 2 pcs. 4 pcs. 6 pcs.

IDG

Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

IDX-OM-W011

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6

ZQ-OM01401

R 3. L 4.

LEC-OM034xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 32 - 9.

NCA1

NCA1-P325 NCA1-P800 NCA1-P1000 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 DD 17/32 21/32 21/32 E 3 1/2 4 1/2 5 F 5/8 3/4 7/8 FL 1 7/8 2 1/4 3 LR 1 1/4 1 1/2 2 1/8 M 3/4 1 1 3/8 MR 7/8 1 1/4 1 5/8 R 2.56 3.25 3.81 Weight (lbs) 3.11 5.80 10.42 Note: Pivot pin is not included Clevis Bracket CB CW CW CD MR BA E LR DD AA M F E FL Dimensions Part No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(colors) No 3 port valves used 2 pcs. (colors) 4 pcs. (colors) Note) Maximum mountable valve number: 40 pcs. (in total of 2 port and 3 port valves) Circuit example 2 port valve 3 port valve 2 port valve 1 pc. 3 pcs. 5 pcs. 1 pc. 3 pcs. 5 pcs. RETURN RETURN RETURN 3 port valve IN IN IN IN IN PA PA PA PA IN PA PA OUT 2 pcs. 4 pcs. 6 pcs. 2 pcs. 4 pcs. 6 pcs.

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Electric Actuator / Slider Type 《 AC Servo Motor 》

LEFB 32 55 61 3.9 40 79 85 5.3 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

MLGP

Lead wire length (m) Load voltage Auto switch model Electrical entry Wiring (Output) Pre-wire connector Special function Indicator light Type 0.5 (Nil) 3 (L) 5 (Z) Applicable load Perpendicular In-line DC AC IC circuit 3-wire 5 V Z76 Reed switch (NPN equivalent) Grommet Yes Relay, PLC 2-wire 24 V 12 V 100 V Z73 3-wire (NPN) Y69A Y59A IC circuit 5 V 12 V 3-wire (PNP) Y7P Y7PV Y69B Y59B

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Input Signals Wiring 7-3-1 Input Signal Wiring Diagram 7-3-2 Input Signal Content 7-3-3 Input Signal Wiring 7-3-4 OUTPUT Signal Wiring 7-3-5 Solenoid Valve Wiring 7-3-6 Sequencer 8. Timing Chart 29 9. Data Setting 37 9-1. Preset Data Setting 9-1-1 Data Classification & Content 9-1-2 Input Method 9-1-3 Confirmation of Set Data 9-2.