Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

CE2

9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25

RSH/RS1H

RB J D-X 20Data 10-9-15 15 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10-9-16 16 Stopper Cylinder Series RSA 50, 63, 80 RE A B Stops pallets gently. Stopper cylinder with built-in shock absorber.

Fieldbus system PROFINET compatible SI Unit

Allocated bytes Unit Unit part number Input Output EX600-SPN3 / 4 (32 outputs) 0 4 SI unit EX600-SPN3 / 4 (32 outputs) 4 4 (with diagnostic data) EX600-DX#B (8 inputs) 1 0 EX600-DX#C (8 inputs) 1 0 EX600-DX#C1 (8 inputs) 1 0 (with open circuit detection) Digital input unit EX600-DX#D (16 inputs) 2 0 EX600-DX#E (16 inputs) 2 0 EX600-DX#F (16 inputs) 2 0 EX600-DY#B (8 outputs) 0 1 EX600-DY#

HRX-OM-W069

Communication example Slave Address : No.1 Read 16 pieces data from register 0030h.

HRX-OM-Z015

Communication example Device Address : No.1 Read 16 pieces data from register 0030h.

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.4 Recirculating fluid Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XL-OMV0002

. 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002

AIR GRIPPER

Max. tightening Maximum screw-in torque depth Model Bolt Depth [mm] (Nm) JMHZ2-8 M3 x 0.5 0.88 6 JMHZ2-12 M3 x 0.5 0.88 6 JMHZ2-16 M4x0.7 2.1 8 JMHZ2-20 M5 x 0.8 4.3 10 Max. tightening Model Bolt torque Nm JMHZ2-8 M2.5x0.45 0.31 JMHZ2-12 M2.5x0.45 0.31 JMHZ2-16 M3 x 0.5 0.59 JMHZ2-20 M4x0.7 1.4 7 - ! Caution 1.

JXCx-OMT0030CN

0 Q_Address 1733 LEC7.1 Q_Address 16 1LEC I_Address .33.11 INPI_Address 15.31 INP LEC6.3 IO Q_Address 16 0I_Address 33.10 INP 33 - 114 LEC IO No (LEC) IO IO (LEC) Q_Address 17 0 Q_Address 1833 LEC*67.1 Q_Address 16 063 Q_Address 17 LEC I_Address .33.11 Q_Address 17 0 I_Address .33.10 34 - 12 121 [IN] I_Address 0 1 2 3 4 5 13 Bit/Byte / I_Address ID No. 0 OUT0 bit

Fieldbus system EtherNet/IP TM compatible SI unit

Occupied byte Unit Unit part number Input Output EX600-SEN (32 outputs) 0 4 EX600-SEN (24 outputs) 0 3 SI unit EX600-SEN (16 outputs) 0 2 EX600-SEN (8 outputs) 0 1 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs)(with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1

SI unit for PROFINET

EX260-SPN3/4: SI unit with 16 outputs, EX260-SPN3 or EX260-SPN4 This SI unit can be used with both firmware version 1.0.0 and 2.1.1 1, but the MRP function is not available. EX260-SPN3/4 MRP: SI unit with 16 outputs and MRP function, EX260-SPN3 or EX260-SPN4 This SI unit can be used with firmware version 2.1.1 1. This SI unit cannot be used with firmware version 1.0.0.

KQ-OMS0022

Tubing size Tensile force of tubing (N) 3.2, 1/8'' 5 4, 5/32'' 8 6, 1/4'' 12 8, 5/16'' 20 10, 3/8'' 30 12, 1/2'' 35 16 50 7 - Caution (1) Chamfer dimension for female thread of the connection thread Confirming to ISO 16030 (air pressure fluid dynamics connection ports and stud ends), the chamfer dimensions shown below are recommended.

Metal One-touch Fittings

Material Gasket M-5G3 Stainless steel 316, Special FKM 1/8,5/32 KQB201-P01 3.24 KQB223-P01 6 KQB206-P01 1/4 KQB207-P01 8 KQB208-P01 C3604 (Electroless nickel plated) 5/16 KQB209-P01 Bulkhead nut 10 KQB210-P01 3/8 KQB211-P01 12 KQB212-P01 1/2 KQB213-P01 16 KQB216-P01 G thread O-ring Spare Parts Description Thread size Part no.

High Vacuum L Type Valve

Specifications Table 1 Valve specifications Table 2 Power/ Current With rated voltage applied Model XLS-16 XLS-25 XLS-16-P*G XLS-25-P*G Flange (valve) size 16 25 16 25 Actuating type Normally closed (N.C.)

CRQ2

16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20

Dedicated Controller

Series LC1 controller (vertical specification) Description Part no. 57026-5000 (for UL1007) 57027-5000 (for UL1015) Crimping tool 57031-6000 Puller 87 16 Series LC7R Brake Wiring Example A wiring example for controller (Series LC1) connectors and a brake is shown below. The brake is in a de-energized condition and locked. 24VDC is required to unlock it.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

(A, B, C common view) 1.5 D9 2024.6 18 4.7 3.4 55.5 2-3 (60) 10 2-4.2 21 2 20 3 10 0 0.05 4 0 0.03 4 0 0.03 Open: 28 Closed: 16 2-M4 x 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 7 7 5.5 5.5 12-5-15 16 Series MHR2/MDHR2 Nominal Size 30 Without auto switch: MHR2-30R 76 73 B MHR2-30E Port Location 3-M5 x 0.8 thread depth 10 P.C.D.43 (Mounting thread) 80 120 15.5 120 Courtesy