VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

0.4

N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

Slider Type/Ball Bushing Bearing

, 200, 300 (N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm

0.4

/Vibration resistance (m/s2) 300/50 Enclosure Dustproof Electrical entry Grommet Weight (g) Screw mount type 27 Quick disconnect type 29 Characteristics Pressure/Flow Rate Characteristics (without filter) Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 380 360 340 320 300 280 260 240 220 200 180 160 140 120 100 80 60 40 20 0 C [dm3/(s/bar)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

1) 5 to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

ASR

AS ASP Pressure Valve: Series ASR Flow Valve: Series ASQ B Knob ASN Knob C Knob AQ D Knob ASV A E Knob AK Adjustment Procedure 2 ASS Pressure Adjustment Speed Control ASR 1. The cylinder speed is adjusted with knobs C , F and G . First have all the knobs fully closed and then open them gradually for adjustment.

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the intersection E upward, and C leftward to obtain the intersection D. 6. The intersection C is the amount of water included in the compressed air 1 m3 at 0.7 MPa with the pressure dew point of 62C. The amount of water is 18.2 g/m3. 7.

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

CC-Link-E

S. t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC ( e. g. ent eri ng a t arget val ue t o t he out put w ord dat a area) . Set D at e 0h 0FFFh [ ( aF. S. ) 4095] H EX O ut put pressure 0% F. S. 100% F.

Digital Flow Switch (Remote type monitor unit)

Response time 1.5 s (100 ms) Voltage output Output voltage : 1 to 5 VDC Output impedance : 1 k Analogue output Output c urrent : 4 to 20 mA Current output Max. load impedance: 600 (24 VDC) Min. load impedance: 50 Accuracy 1%F.S. max.

Digital Flow Switch

) [100] 100 L/min (PFMB7202) [F 3] [rES] [rES] Response time [1.00] 1 second page 41 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 42 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 43 [F20] [inP] [inP] External input 3 [rAC] Accumulated flow external reset page 44 [F22] [FrE] [FrE] Setting of analogue output 4 [oFF] Variable range OFF page 45 [

MHY2/MHW2

Holding point L (mm) 120 80 160 200 20 40 60 Holding point L (mm) 80 0 20 40 60 Holding point L (mm) 80 100 120 MHW2-25D MHW2-40D MHZ2 160 50 Pressure 0.7MPa Pressure 0.7MPa 140 MHZJ2 0.6 0.6 40 120 Holding force (N) Holding force (N) 0.5 0.5 MHQ 100 30 0.4 0.4 80 0.3 MHL2 0.3 20 60 0.2 0.2 40 10 MHR 20 0 20 40 60 Holding point L (mm) 100 80 20 40 60 Holding point L (mm) 80 100 120 140 160

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 40 L/min) below 80 L/min) 50 to 1050 L/min 100 to 2100 L/min 5.0 0 to 5%F.S. (Displays 0 when the value is (Displays 0 when the value is below 50 L/min) below 100 L/min) 60 to 1050 L/min 120 to 2100 L/min 6.0 0 to 6%F.S.

VZ1000

+ COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note 1) Value at manifold base mounted, single operating Note 2) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.