Mini Rotary Actuator

Trouble with the electrical specification Check there is no trouble with the electrical specification. 36 - Revision history A:Corrected to the latest format 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

CYBx-OM0001H

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

In-line Air Filter

Unlocked Locked (2) Lock mechanism (7) (3) Product no. display (6) Body Element (4) (5) Cover Raised part of the cover 12 - Revision history Rev.A: The ZFC1series and ZFC3 series added. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

Electric Actuator Miniature Rod Type Miniature Slide table Type

No.LEP-OM00203 Oct / 2013 Revision No.LEP-OM00204 Jan / 2015 Revision Change of specification No.LEP-OM00205 Mar / 2016 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation All

VNA Series

Detailed content of the failure Operating cycle Operating fluid Machine used Operating temperature Fluid pressure Pilot pressure 9 VN-OMA0002-D B Renewal PS Revision history C Renewal RP D Renewal RY 1st printing: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

XLG Series

First tighten them evenly by hand until the O-ring is compressed, and then apply extra tightening overall to complete. 15 XL*-OMI0010-E Revision history Construction oo Safety Instructions PQ Limited warranty and Disclaimer SR 1st Printing :JP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are

Parallel Type Air Gripper

.: GR-S-010 (10 g) H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported The end boss assembly other than type E should be mounted on the special body. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice

High Vacuum L Type Valve

The procedure 4 can be done easily and accurately. 12 XL*-OMI0013-B Revision B RENEWAL 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved XL*-OMI0013-B

XMA/XYA Series

Wipe off any dust from the valve seal O-ring and the Bellows holder surface. 13 XM-OMP0001-A Revision history A Limited warranty and Disclaimer Ro 1st Printing :PV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Title not found

A Thd B Thd C Dia Part No. 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MPC

Application Example Aligning different sizes of packages on conveyor: MPC Series Specifications Specifications Table Supply Exhaust 1/4 OD ports 40mm 25mm Bore Vent 100mm 50mm Stroke 16mm 12mm Rod diameter Extend 880 N (199 lbf) 344 N (78 lbf) M12 Pin Callout Thrust at 80psi (theoretical) Retract 739 N (166 lbf) 264 N (59 lbf) Power (BRN) 0.7 Mpa (101 psi) Maximum pressure 1 Input signal

Doc. no.MX*-OMG0114

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

240

tapped hole, drilled hole and pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60 9.5 11-/22-MXP6-10 101

SL5200

25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101

CXT

MGQ Theoretical Force MGG (N) MGC IN OUT Cylinder bore size (mm) Operating pressure (MPa) Operating direction Piston area (mm2) 0.7 0.5 0.3 MGF 84.8 IN 59 42 25 12 113 OUT 79 57 34 CY1 151 IN 106 75 45 16 201 OUT 141 101 60 MY1 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628

Table of Contents

Series AKH/AKB Check Valve with One-touch Fitting. 92 92 92 93 94 95 95 95 95 97 99 100 100 100 101 102 103 103 104 105 106 107 107 107 108 109 110 110 111 112 113 114 114 114 115 115 116 116 116 116 117 117 118 118 118 119 119 120 120 122 123 124 124 124 124 125 125 126 Features. Series AKH/AKB Check Valve with One-touch Fitting. How to Order. Specifications. Dimensions . Construction.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MRHQ

9200-www.stevenengineering.com 0 -0.074 26.3 opened +2.2 -0.2 8 0 -0.1 54h9 MHS 16.3 closed 0 -0.7 0 -0.05 M5 x 0.8 Finger closing port 10 4-M4 x 0.7 (attachment mounting screw ) MHC 5 20 MHT 24.5 9 Max. 9.2 4-M6 x 1 depth 9 (two on opposite side) 51 MHY M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 MHW MRHQ 16.5 27 19 26 9 39 36 Misc. 6.5 2-6.5 through 2-11 depth of counter bore 2.8 D8 46 101