Material: S (Stainless Steel 304), Number of Arranged Elements: 29, Element Length: C [ℓ750 (ℓ250 x 3)], Port Size: 60 [150 (6B)], Element Type: M (Micromesh, Stainless Steel 304/Epoxy Material), Nominal Filtration Accuracy: 20 μm, Element Seal Material: V (FKM)

Material: S (Stainless Steel 304), Number of Arranged Elements: 7, Element Length: C [ℓ750 (ℓ250 x 3)], Port Size: 20 [50 (2B)], Element Type: M (Micromesh, Stainless Steel 304/Epoxy Material), Nominal Filtration Accuracy: 40 μm, Element Seal Material: V (FKM)

RSQ

RB 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V J Connector 3-wire (NPN) Relay, PLC 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D3-wire (PNP) Grommet 12 V Water resistant (2-color indication) 2-wire -X With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit 20Lead wire length symbols: 0.5 mNil (Example) A73C 3 m L (Example) A73CZ

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

A96 A96V 5 V IC circuit Yes A72 A72H 200 V 100 V 12 V Grommet A93 A90 A93V A90V No IC circuit 5 V,12 V 12 V Relay, PLC 100 V or less 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Yes Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with a "" are produced upon receipt of order.

Body Size: 30, Thread: Rc, Port: 03 (3/8), Option: M [Round type pressure gauge (with colour zone)], Attachment: SV (S + V), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port: 04 (1/2), Option: M [Round type pressure gauge (with colour zone)], Attachment: SV (S + V), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 50, Thread: Rc, Port: 06 (3/4), Option: M [Round type pressure gauge (with color zone)], Attachment: SV (S + V), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Actuation: 1 (Single Type), Body: 5 (Base Mounted), Option: V (Vacuum), Voltage: 5 (24 VDC), Electrical Entry: MO (M Plug Connector, w/o Connector; with Light/Surge Voltage Suppressor), Port Size: M5

Sensor Type: Contacting, Output Format: N/A, Wiring Method: 2-Wire, Type: Main Body, Electrical entry direction: Perpendicular, Lead wire length(m): 0.5, Applicable load: Relay / PLC, Load Voltage: 200 V AC

Sensor Type: Contacting, Output Format: N/A, Wiring Method: 2-Wire, Type: Main Body, Electrical entry direction: Perpendicular, Lead wire length(m): 3, Applicable load: Relay / PLC, Load Voltage: 200 V AC

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Thread Rc G NPT Nil None V V V A Yes 6 V B 1/4* V Z With light/surge voltage suppressor Port size Port size VP500 VP700 03 3/8" V 04 1/2" V * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 4 for selection of the check valve.

PF-OMN0009_C

1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: MO (M Plug Horizontal Connector w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: MN (M Plug Horizontal Connector w/o Lead Wire), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: V (Panel Mount Adapter

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration