DOC1001947

Description Material Note 1 Body A Stainless steel 2 Body B Stainless steel 3 Needle Stainless steel 4 Knob Stainless steel 5 Lock nut Stainless steel 6 C-ring Stainless steel 7 Seat ring Aluminum alloy 8 U-seal FKM 9 O-ring FKM 10 O-ring FKM 11 Seal FKM 12 Cassette Stainless steel 13 Gasket Stainless steel/FKM M5 type 14 Seal FKM G thread type 10 - Revision history A version: Size 1/4, 3

EXxx-OMP0004CN

No.EX-OMP0004CN-I SI (CC-Link ) // EX260-SMJ 2 8 9 10 10 11 LED 16 21 26 26 27 28 -1No.EX-OMP0004CN-I (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

KFx-OMV0011

Specifications 9-10 4. Troubleshooting 10 5. Construction 11 6. Applicable Fluid List 12-13 2 - KFG2 Series Stainless Steel 316 Insert Fitting Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 G36-10-01 G46-10-02 Gauge (5) 1.0MPa Accessories (Options)/Part No.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Time Delay Valve

Application 10 3. Specifications 10 4. How to Order 10 5. Operation Patterns 11 6. Characteristics 11 ~ 12 7. Dimensions 13 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

SI unit for CC-Link

C: Contents are added. D: Contents are added. [June 2017] E: Contents revised in several places.

ATX-OM-F004E

Electrical wiring 10 8. Maintenance 11 9. Mounting accessories (option) 12 10.

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 G36-10-l01 G46-10-l02 Gauge (5) 1.0MPa Accessories (Options)/Part No.

MHC2

Model Bore size mm Holding moment (effective value) (1) Opening/closing angle (both sides) Weight (2) Action Model g 39 91 180 311 10 16 20 25 0.10 0.39 0.70 1.36 MHC2-10D MHC2-16D MHC2-20D MHC2-25D 30 to 10 Double acting 0.070 0.31 0.54 1.08 10 16 20 25 39 92 183 316 MHC2-10S MHC2-16S MHC2-20S MHC2-25S MHC2-16S 30 to 10 Single acting MHC2-10D Note1) At pressure 0.5MPa.

ZSE1/ISE1

, Ripple (P-P)10% or less 1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC 5 ms or less 1% F .S. or less IP40 Operating: 0 to 60C, Stored: 10 to 60C (With no condensation) Operating/Stored: 35 to 85%RH (With no condensation) 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized) 980 m/s 2 in

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

0 w y t r Size q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. o Electrical entry/Lead wire length e Shaft type 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 10) Weight in the dry state without circulating fluids 108

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-2-10-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.