Thermo-chiller Series HRZ Fluorinated Fluid Type Approx. 16 Required flow Note 9) (50/60 Hz) (l/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications 5/5 6/6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25
SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30
Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)
Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For
5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16:
Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 190 90 180 100 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch
20, 25, 30, 35, 40, 45, 50, 75, 100 IN 840 1400 1960 63 63 OUT 936 1560 2184 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke.
Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.
Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For
Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option Cooling capacity Option Symbol Symbol 002 008 015 030 Cooling capacity None Nil C D N Z 2 kW Analog communication 8 kW DeviceNet communication 15 kW NPT fitting 30 kW Circulating fluid automatic recovery Pump inverter control Temperature range setting Pump inverter control None Applicable
Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.
No gauge port Ports No code No code M V X No pressure gauge (Connections: 1/4 inch face seal male) Code Ports 2 ports 3 ports 4 ports 0 2PW 3PW 4PW V3 L 1 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig Porting Configuration
SP2430 SP1530 SP2530 SP1630 SP2630 Rectangular Square Type Flatness (m, or less) 15 15 25 25 25 15 Suitable for adsorption and fixing in place of film and soft sheets High processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 40 40 40 30 Rectangular Square Size Sintered body particle diameter Aperture ratio Material
circuit 30 Nil E None With power-saving circuit 40 Electrical entry direction Orifice diameter Piping direction 45 left direction IN Symbol Series Orifice diameter (mm ) IN 1 3 4 6 1.0 3.0 4.5 6.0 30 L1 Nil 40 OUT OUT Quick Fastener Clip Part No. 90 left direction 45 right direction Series Size Quick fastener clip part no. (2 pcs.)
Vacuum Flow ZH--X185 Series RoHS How to Order B X185 ZH 20 Passage diameter Dust bag Nil D Without dust bag With dust bag (Supplied with product) Hose band attached mm Symbol Bracket Nil B Without bracket With bracket 10 20 30 40 13 21.6 30 42 SP ZCUK Specifications Warning AMJ Model ZH10-X185 ZH20-X185 ZH30-X185 ZH40-X185 Body material Seal material Bracket material Dust bag material Hose
Solenoid Valve Specifications Fluid Air 0 to 0.7 1 port: 100 kPa to 0.6/3 ports: 100 kPa to 0 1 port: 100 kPa to 0/3 ports: 100 kPa to 0.6 10 to 50 (No freezing) 20 Not required Unrestricted 150/30 Dustproof 24 VDC, 12 VDC 10% of rated voltage Note 2) Positive pressure N.C. N.O.
and caution plate for bowl in imperial units (PSI, F) Symbol 1 10 11 2 3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40
Continuous duty When long term energizing is required, the continuous energizing time should not exceed 30 days. 3. Energization time The double solenoid valve must be energized for at least 0.1 second to ensure proper operation. Avoid the following locations or environments to prevent valve trouble. If it is unavoidable install a cover, etc. for protection. 1.
AV Tightening Torque when Piping Connection thread Applicable torque (Nm) M5 x 0.8 1.5 to 2 1/6 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 AU Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 2 AF Model Connection R AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Effective area (mm2) AR M5 x 0.8 1 8 1 4 3 8 1 2 3 4 5 35
Please contact us when using this product in locations where there are vibration levels of 30 m/s2 or above or highly magnetic fields. No problems arise in normal usage or locations. 4. This valve retains the reset position (Flow path: A R) at the time of shipment. However, it may alter to the set position during transporatation or due to vibration when mounting the valve.