2/3 Port Valve

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications Made to Order Specifications Clean room specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116

CRB1/Size: 10, 15, 20, 30

30 50 60 30 30 50 60 Angle adjusting unit 30 47 90 150 30 47 90 150 1.1-4 Copper Free Precautions Size Rotation Vane style Port position 20 CRB1BW Be sure to read before handling.

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

ITV

Output deviation factor (% F.S.) 20 0.5 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 Flow rate (l/min(ANR)) VAC side pressure (Supply pressure) (kPa) 14-8-31 32 Dimensions ITV2090 Note) Do not attempt to rotate the cable connector, as it does not turn.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

PF2A/PF2W

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Modular Type Filter Regulator Series AW

to Order 03 BG 30 AW F 2 N X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is

70pvpump

30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

Guide Table Series MGF ø40, ø63, ø100 1

(4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) MGF63 Load weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200

MHF2

External Gripping Internal Gripping MHZ MHF MHL L L F F MHR MHK MHS MHF2-12D MHF2-8D MHC 70 Pressure 0.7MPa MHT 30 60 Pressure 0.7MPa 0.6MPa MHY 0.6MPa 50 Gripping force N Gripping force N 0.5MPa MHW 20 0.5MPa 40 0.4MPa MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 0 0 80 40 30 20 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa

MHF2

MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 40 30 20 10 0 0 80 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping

Round Type Hydraulic Cylinder

A1 L1 R1 U1 NDH10 E1 MM NX Applicable bore size (mm) I-020B I-032B I-04A IA-04 A B C D E F M R Size Tolerance Note +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

04-mis-e

-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS-A0804