! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

4 24 17 28.6 70.3 61.8 ASP630F-04-12S-X369 12 21.7 35.2 49.5 25 21.8 ASP330F-N01-07S-X369 NPT1/8 10-32UNF 12 8 14.2 23.9 31 13.6 38.6 35.2 16.8 1/4 13.2 ASP430F-N02-07S-X369 25.2 34.4 18.3 16.8 ASP430F-N02-09S-X369 5/16 15.2 27.2 36.4 18.4 18.7 17.46 12.7 18.5 48.7 42.4 NPT1/4 ASP430F-N02-11S-X369 3/8 18.5 35.3 44.5 19 20.8 NPT1/8 ASP530F-N03-09S-X369 5/16 15.2 29.7 41.2 18.7 NPT3/8 19 12

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

X Y (mm) Size Y X Body (B) 10 3 19 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 114

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

21 16 19 21 15 18 20 16(15) 19(16) 22(18) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29(0.28) 0.24(0.27) 0.23(0.30) 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2(4.0) 4.8(4.5) 5.5(4.8) 1.9 VPA4150 Single 2.7 2 position 1.9 VPA4250 Double 2.7 2.5 Closed center VPA4350 3.3 3 position Exhaust center 2.5 VPA4450 3.3 Note) ( ): Normal position Valve model Function Mass (kg) Effective area mm2 Port

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MDSUB 1 double vane type has a different figure. 11-5-19 19 Series MSUB These drawings indicate the condition when the B port is pressurized.

Flow sensor

PF-OMK0004-F PRODUCT NAME Flow sensor MODEL / Series / Product Number PFMV5## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Troubleshooting 18 Specifications 19 Specifications 19 Characteristics data 20 Dimensions 22 -1No.

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

ZVB20_E_

.: ZVB-D3A) ZVB-AC1) ZVB-P1A) -10- 3 m exhaust duct hose Dust collecting bag Appearance of the product with the options mounted 2.3 Construction 1 3 19 4 5 2 12 6 8 14 7 15 9 13 11 16 10 18 17 20 Component parts No. Description Remarks No.

ZVB40_E_

.: ZVB-D3A) ZVB-AC1) ZVB-P1A) -10- Dust collecting bag 3 m exhaust duct hose Dust collecting bag Appearance of the product with the options mounted 2.3 Construction 1 19 4 3 5 2 12 6 8 14 9 15 7 13 16 10 11 17 18 20 Component parts No. Description Remarks No.

PAB-OM-K007

3/4" Actuation Thread type Option Symbol Option Symbol Actuation Symbol Type Nill None 0 Automatically operated Nill With silencer Fitting type Symbol Fitting type Fitting size side OUT side Symbol 5 19 1925 5 6 2519 6 5 25 6 6 - 7.

PAB-OM-K008

Type 3 Air operated Nill Rc N NPT Fitting type F G Symbol Fitting type 1 LQ1 Fitting size IN side OUT side Symbol 19 5 5 6 1925 6 5 2519 25 6 6 - 7.

Pin Cylinder/Single Acting, Spring Return

When embedded O-ring Air Machining dimensions for mounting Sealed with O-ring Air Bore size (mm) Stroke A B C D E F G 5 12 8.5 6 4 3.5 M8X1.0 6.5 3 10 20 16.5 14 15 28 24.5 22 5 16 12.5 10 6 3.5 M10X1.0 8.5 3 10 23 19.5 17 15 30 26.5 24 5 17 13.5 10.5 10 3.5 M15X1.5 12 4 10 23.5 20 17 15 30.5 27 24 5 19 14.5 11.5 16 4.5 M22X1.5 19 5 10 25 20.5 17.5 15 31.5 27 24 Note) E and F should be machined

MWP_E

the output and stroke 10 Installation and Handling Mounting Orientation / Installation 11 Application Examples 11 Cylinder Replacement 12 References 12,13 Maintenance and Inspection Check 14 Daily inspection 14 Regular inspection 14 Consumable parts Replacement parts 15 Storage of seals 15 Grease package 15 Basic Circuit for Cylinder Operation 16 Troubleshooting 17,18 Basic construction 19

POWER CLAMP CYLINDER

Refer to Replacement Parts (CKZ5N : P.19, CKZ5T : P.22) for the part numbers of the switch cassette replacement parts. Switch Cassette Mounting Bolt Tightening Torque Bore size Tightening Torque(Nm) 5063 3.0 to 4.0 15 - Proximity switch installation example ! Caution Be careful not to cut your hands at the edge of the switch cassette.

CEx-OML0058

Noise countermeasures 19 Chapter 6: Piping 6-1. Example of Recommended Pneumatic 1920 6-2. Installation 20 6-3. Air Balance 20 Chapter 7: Structure and Measuring Principle 7-1. Structure 21 7-2. Measuring Principle 22 Chapter 8: Brake Mechanism 8-1. Working Principle of Brake Mechanism 22 8-2. Manually Unlocking 23 8-3. How to change from Unlocked to Locked State 23 8-4.

MH-OMY0004

MH-G04(30g) 10 2 16 3 20 4 25 5 19 3-5. / / / 10 16 20 25 20 1 10: 2 1625: 1625: 3 4 5 6 7 8 A 9 B 10 11 12 13 14 15 C 16 MHY2-10D MHY2-16D MHY2-20D MHY2-25D 17 18 MHY10-PS MHY16-PS MHY20-PS MHY25-PS 19 20 21 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to

Air Gripper for collaborative robots.

Set "Digital Output 0" and "Digital Output 1" to "Sinking(NPN)". 19 2. Select "SMC Air Gripper Unit" on the "URCaps" menu for basic settings.

MHx-OMZ0005

Nm JMHZ2-16D M3x0.5 0.59 17 - MOTOMAN-HC10 M6x12 6.3Nm 18 - M6x23 6.3 Nm M4x10 1.0Nm 19 - M8 M8 M8-MOLEX S1 S2 M4x8 1.0Nm 20 - (M4x6) (M4x6) 1.0Nm P175-2. M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

Solid State Auto Switch

No.D-S-OMB0023-C PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-S9### D-T99### D-S7### D-T79### Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 11 Definition and terminology 11 Mounting and Installation 12 Installation 12 Circuit diagram 14 Troubleshooting 15 Specifications 19 Dimensions 20 -1No.D-S-OMB0023-C Safety