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Step 8 3 Bolt b Tightening torque of bolt b Nm Valve 1 2 Size Tightening 4 Torque X*D-25 1.5 -40 2.5 -50 6 -63 6 Bonnet assembly -80 15 Pilot port M Body Apply 0.2MPa of air pressure to the pilot port M (for main pumping). Tighten bolt b in numerical order to assemble the body and the bonnet assembly.

HRX-OM-W038 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety

(see Figure 2) (1) Connection and disconnection of tube from one-touch fitting Installation of tube 1) Cut the tube perpendicularly, being careful not to damage the external surface. Use an SMC tube cutter TK-1, 2, 3 or 6.

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Fig. a Fig. b Double Single Double Double Double Single Double Double 1 No. 0 2 4 6 Side A No. 5 Side A 0 2 3 Input block SI unit Tie-rod (2 pcs.) accessory 3 4 Station Station 1 2 3 4 1 2 3 4 7 2 No. 1 3 5 7 Side B No. 1 4 6 Side B Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 No.EX-OMW0014CN-A / *3) 1 1.5 3) 1 1 5 No.EX-OMW0014CN-A () () () () 6 No.EX-OMW0014CN-A / () * UL , UL1310 Class2 7 No.EX-OMW0014CN-A * IP65 / *() SI SI

for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult P/A for detailed dimentions, specifications and lead times. 1 Without V-band Support -X19 3 Chemical Resistant Type -X68 Useful for reverse IN-OUT installation

Symbol Description Power supply ON 1 1 1 1 Intermediate 1 q Intermediate 2 q Intermediate 3 q Motor side End side A B C D E MIDDLE Indicator light (Green) q q q 2 MOTOR Indicator light (Green) q q q END Indicator light (Green) q q q q q q q q PWR Indicator light (Green) q ALM Indicator light (Red) q indicates on status, and indicates off status. 1) Displays for the 5-point stoppable type

T Body size Pilot type Valve stations Port size 1 22 2 stations P , R A Internal pilot 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 2 Common external pilot 8 2 8 stations 3 8 1 4 A B C 2 stations 1 Internal pilot 0 1 For VY140 3 8 4 2 Common external pilot 3 8 1 2 6 Dimensions 6 stations VVEXB Connection mark All types

Mode 1: Allocation to the right f) Unit address from the end plate. order Mode 1/Mode 2 Mode 1 Available Mode 2: Allocation to the left from the wireless unit.

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0003 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0003 1.

rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise simulation) Noise tolerance Note 3) Fast transient noise: IEC61000-4-4: 1 kV VDW30: 3 W (With 0.5 W power-saving circuit) VDW40: 6.5 W (With 1 W

Actuating chamber A Actuating chamber A Actuating chamber B Actuating chamber B Discharge Discharge port port Pump chamber B Pump chamber B Pump chamber A Pump chamber A Suction port Suction port Diaphragm Fig. 1 Fig. 2 Fluid flow Air flow 13 11. Sensor mounting (leakage sensor) Series PAF can have a sensor for detecting diaphragm breakage.

EX510 1 4 3 2 Wiring of branch cables 4 branches for input 4 branches for output COM D COM C COM B COM A Communication wiring Connect CC-Link dedicated cables to the communication connector for CC-Link. Branch cable Branch connector at GW unit side (1) Make sure to connect the signal cables to designated pins (Refer to Drawing 1).

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety. JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines.