m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
Available in standalone or manifold configurations.Large suction flow rate, suitable when used with large pads or multiple pads, Vacuum module suitable for handling workpieces of 0.5 to 5 kg., Compact, lightweight, Manifolding possible, VALVE UNIT, VACUUM SERIES, ZR MODULAR VACUUM SYSTEM, MG, ZR BODY SIZE 100, .00000 lb
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38