LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

LEC-OM036xx

LEC6 DC24 0V Shutdown is lifted Switch Ry Stop Switch Gateway EMG + Surge suppressor Ry Unit EMG Power supply plug (1st. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (2nd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (3rd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Caution When the stop signal

LEC-OM034xx

LEC6 DC24 0V Shutdown is lifted Switch Ry Stop Switch Gateway EMG + Surge suppressor Ry Unit EMG Power supply plug (1st. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (2nd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (3rd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Caution When the stop signal

LEC-OM032xx

LEC6 DC24 0V Shutdown is lifted Switch Ry Stop Switch Gateway EMG + Surge suppressor Ry Unit EMG Power supply plug (1st. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (2nd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (3rd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Caution When the stop signal

ITV-E

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

3 Port Solenoid Valve

Solenoid Valve Specifications Fluid Air 0 to 0.7 1 port: 100 kPa to 0.6/3 ports: 100 kPa to 0 1 port: 100 kPa to 0/3 ports: 100 kPa to 0.6 10 to 50 (No freezing) 20 Not required Unrestricted 150/30 Dustproof 24 VDC, 12 VDC 10% of rated voltage Note 2) Positive pressure N.C. N.O.

RSH/RS1H

200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Air Slide Table Traveling parallelism C 11-MXP Cylinder bore Stroke Adjuster option D Surface C to surface A M Clean series Vacuum type B Surface D to surface B W 11-MXPJ6Stroke A Port C Clean series Vacuum type This type has a relief port provided in the side of the body, and the spread of particulates into a clean room is prevented by vacuum suction of the linear guide section and the

Multi-Axis Step Motor Controller

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Low Differential Pressure Sensor

Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

Polyurethane Tubing Series TU/TIUB  — 20 m roll  — 100 m roll Model/Specifications For general pneumatic tubing — Option — Manufactured upon receipt of order (Please consult with SMC.) Flexible Tubing size Polyurethane tubing Metric size (Series

Operating temperature 20 to 60C 4 Material Polyurethane 3 How to Order 2 Maximum operating pressure 1 TUH0604 B 20 0 -20 0 20 40 60 Length per roll Operating temperature (C) Tubing model Symbol 20 100 Length 20 m roll 100 m roll Precautions Color Be sure to read before handling.

PA3000/5000/PAX1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

V 100 V or less 100 V, 200 V 200 V or less 5 V 3-wire (NPN equiv.)

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.