Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

CEx-OMQ0011

" " " " 11-1-3 PRESET " P1 UPDOWN PRG STEP P1 " 1000.0 " " " 1 READ " " P1 " UP DOWN P1 P2 P3 P4 P5 P6 P7 P8 48 11-2 11-2-1 PROGRAM STEP 0 End PRG 1 UPDOWN No.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Temperature Monitor unit p2%F.S.(15 to 35oC) p5%F.S.(0 to 50oC) (15 to 35oC) p2%F.S.(15 to 35oC) p0.5%F.S. p5%F.S.(0 to 50oC) p2%F.S. p5%F.S. p5%F.S.(0 to 50oC) (0 to 50oC) (0 to 50oC) (PF2A7<

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

ITV2-OM00112_E

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method P5 Setting method P5 Error indicating function P6 Zero clear P6 LED display P7 1 - E/P Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

XL-OMY0001

1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

3

p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]

LOCK UP VALVE

NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

ZL3-OM00801

11) 12) 8 No.ZL3-OM00801-A 3.3 3.3.1 1 2 3ISO8573-1:2010(JIS B 8392-1:2012) 2:6:3 ISO8573-1:2010JIS B8392-1:2012 AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5

VH Series, 4 Way Hand Valve

VH200 24404 (24404-1) 24408 24077 JIS B2401 P5 JIS B2401 P42 2407102A Material No.

Clamp Cylinder with Lock Series CLK1

Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Manifold Regulator Modular Type ARM2500/3000 Series

resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5

Hand Valve Series VH

VH200 24404 (24404-1) 24408 24077 JIS B2401 P5 JIS B2401 P42 2407102A Series VH200 VH300 VH400 Part No. 244010 24418 240258 Material No.

Hand Valve Series VH

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano