Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: Suction Filter, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: M Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: w/o Supply Adapter, for Manifold

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port: ø4,

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 110VAC, 50/60Hz, Electrical Entry: L Plug Connector w/o Connector, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: Suction Filter, Pressure Sensor Specs: w/o Pressure Sensor, Air Pressure Supply, P Port: ø4, Straight, Vacuum

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S., Air Pressure Supply, P Port: w/o Supply

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Table of Contents

22 Series CY1F Specific Product Precautions 4 Be sure to read before handing.

Rotary Actuator/Vane Type

12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

Series KV2 Fittings

22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.

2/3 Port Valve

system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Electric Actuator/Slider Type

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the Z-phase rst detecting position.

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

10

45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 MB-B12 125 136 90 78 60 15 110 32 136 13 13.5 24 14 75 267 25+0.084 0 Rotating Angle Model without air cushion is designed to include rubber bumpers.

CM2

10 33.5 12 19.5 8 M10 X 1.25 22 15 12 13 25 8 45 26 34.5 1 to 300 17 6 5.5 M26 X 1.5 22 12 37.5 15 19.5 10 M10 X 1.25 27 15 20 13 32 8 45 26 21.5 42.5 1 to 300 22 8 7 M32 X 2 24 14 46.5 15 21 10 M14 X 1.5 33 20 16 40 11 50 32 With rod boot h Symbol Bore S U Z ZZ P 1/8 1/8 1/8 1/4 RR Stroke f e 1 to 50 62 11.5 115 124 9 20 Bore 51 to 100 101 to 150 151 to 200 201 to 300 68 81 93 106 131 17

High Purity Fluoropolymer

A L1 L2 H G F M N E B LQ2R4C-M LQ2R4B-M LQ2R4A-M LQ2R3D-M LQ2R3C-M LQ2R3B-M LQ2R3A-M LQ2R2F-M LQ2R2E-M LQ2R2D-M LQ2R2C-M LQ2R2B-M LQ2R2A-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 4 19 18 19.9 12 34.5 22 6 1/4" 16.5 43 23.5 1/4" 42.5 43 5 24 26.2 18 29.5 9 22 23 3/8" 42.5 52 51 52 51 59.5 58.5 59.5 58.5 30 3/8" 6 30 33.1 22 36

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 x 0.8 M5 x 0.8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 11-2-22 22 Series CRB2BWU Rotary Actuator with Angle Adjuster Vane Style Dimensions: 40 (With angle adjuster) Single vane type/Double vane type With angle adjuster CRB2BWU40-S/D CRB2 6-M5 x 0.8 depth 10 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 A port B port MSQ MRQ D20Rotary actuator A port B port Angle adjuster Cap

Table of Contents

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 x 0.8 M5 x 0.8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 11-2-22 22 Series CRB2BWU Rotary Actuator with Angle Adjuster Vane Style Dimensions: 40 (With angle adjuster) Single vane type/Double vane type With angle adjuster CRB2BWU40-S/D CRB2 6-M5 x 0.8 depth 10 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370