SMC Corporation of America
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/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

x 1 Pilot hole diameter 5.1 320.05 30 D B 2 x M5 x 0.8 Piping port 80.05 W 13 47 4H9 0 +0.030, depth 2 J 8 5 16.5 14.5 Section AA Mounting datum level D B 4H9 0 +0.030, depth 2 QL Q Without magnet and switch rail MXP16-30B 8 2 x M2 x 0.4, depth 3 10.7 8.5 L 2 x M3 x 0.5, depth 3.5 6 x M5 x 0.8, depth 7 20 20 (mm) H J K L M MA Q QL S V W Z Model MXP16-20B 58 93 40 36 40 30 58 22 20 82 65 102

After assembling the Oring, assemble the bumper retainer assembly referring to section [102. Bumper Retainer Assembly Replacement] (P24).

o) ++-~~==-l Series NVFR4000:Base Mounted 1)rpe Non Plug-in type: 2 position Single, Double, 3 position/Dimensions inch (mm) ) 2 position single:NVFR4110-0E, NVFR4110-00 '4 NPTF External ilot operator port 608(1545) 0.61 (1~ (15.5 ) 0.26(6.5) Dia 2 Mounting holes V iii 1/8 NPTF 2 port (PE port) 1.57(40) 1.77(45) 2.05 52 4.02(102) G(PF)I/2 DIN Connector Cable:0.27(6.8)-o.45(I1.

Extension locking (F) M3 x 6 11 2 x Rc1/8 Extension port 39 3 x Rc1/8 Retraction port Dust cover 20 60 25 34 + Stroke 5 6 12 53 4 12 Head end cushion valve 9.5 19 47 45 M10 x 1.25 40 12 47 10 26 Width across flats 10 26 Width across flats 36 R12 12 +0.5 +0.2 0.040 0.076 Shaft: 10d9 Hole: 10H8 26 12 6 +0.022 0 102 + Stroke 55 41.2 169 + Stroke 49 Note) Refer to page 14 and 15 for Accessories

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 to 0.1 MPa 0.05 MPa 102 /min (ANR) Operating pressure differential range IR Recommended press. differential (3) Press. differential setting min. flow VEX 2000 5000 2000 5000 Bowl capacity between levels (cm 3) Turbine oil Class 1(With no additives

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 23 Note 1) Width across flats22 34.2 30 102 117.5 A Rc, NPT, G 1/4, 3/8 S coupler plug mounting Note 1) VMG12/Piping entry: Top 34.2 Width across flats 22 Rc, NPT, G 1/4, 3/8 Rc 1/4 Nozzle S coupler plug mounting 172.5 147 23 102 30 A 117.5 mm mm A 23.4

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

Applicable N Q L K J B C H F E D A flange M N 25.5 28 28 M 84 (94) 95(105) 106(117) N 41.5 44.5 44.5 M 84 (94) 95(105) 106(117) M 84 (94) 95(105) 106(117) Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 32A 40A 50A VXP2382 VXP2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 169 (186.5) 51.5 54.5 59 100 105 120 36 42 52 23 25.5 25.5 35 40 40 12 14 14 92 (102

Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 2.2-15 Series SYJ300 42 Type Manifold: Side Ported/SS3YJ3-42Station -M5, C4 Grommet (G), (H) C4 (Built-in one-touch fitting) (Lead wire length) 29.5 48.5

03 2 (A) 4 (B) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 62 74 49 62 2 (A) 4-5.5 4-6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Female thread One-touch fitting One-touch fitting One-touch fitting Vacuum Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible

Filter case Filter element (ZR1-FZ) Vacuum switch Gasket slot Filter gasket Filter block 13-3-18 18 Series ZR Large Size Vacuum Module: Ejector System Dimensions: ZR1-F Circuit diagram ZR1-FE Spacer A 24.5 2Slitted hole (Mounting hole)1 43 10 23 102 232 102 Indicator light (Red) ZX Vacuum pressure setting trimmer 8 28 Vacuum switch Thickness 1.2 ZR 671 571 31 Spacer A is used to leave space

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

SP 0300 trot Btock 1-lXT01&3Clrt t 4-fNXToa}la.t Hotd Down Bolt. l, 1{ {Or't lt .l DtitEl{stot{s A B c D E 4.01. (102) 2.13 (31) 0.$ (2s) o.17 114 0.31 (8) Mlrntars in Parenthoses Optlonal SPA02O0 Interface apeed control w/crossover pilot holes to connect with sub.olate.

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certificate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol Port size Rated flow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.