ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

VP3145/3165/3185

DIN terminal: VP3185-D Conduit terminal: VP3185-T A B A B VQZ VZ Conduit terminal with indicator light (TL) G 1/2 Max. 11 Applicable cable 6 to 12 VS Light Light VFN Rc 1/4 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-7 8 Made to Order Specifications: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 80 Type of actuation Body size

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Clean Regulator/Fluororesin Type

y t y r i r u i !

70pvpump

N 1 PTFE T, F, N are options.

VXF

Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.

PA3000/5000/PAX1000

3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are order made specifications.

HRX-OM-R005

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

OMU0023

Step Request data Response data Operation details 1 01 06 0412 000A 01 06 0412 000A Sets Step Data No. 1 Positioning time to 0.1 sec. 01 10 0410 0002 2 01 10 0410 0002 Sets Step Data No. 1 Target position to 10 mm. 04 0 2710 (4) Return to Origin Change the Card Motor controller (controller ID1) operation mode to serial operation, and send a Return to Origin instruction.

ZMA

Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no. Example) Manifold model no.: ZZMA04-SR (1 pc.)

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

ZFC201-07 ZFC100-06 ZFC101-07 Cover Element (Replaceable) 0.1 1 10 100 Flow rate (l/min (ANR)) Bracket Replacement Parts Description Part no.

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

Electro-Pneumatic Proportional Valve Series VEF/VEP

F2 P3 wSub-plate Thread type Port size Thread type Rc G Note) Symbol Port size 1/4 3/8 Nil F N T Symbol 1 2 NPT NPTF !1Gasket DXT172-7 !

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Model AMR3000 AMR4000 AMR5000 AMR6000 Model name 1 4 3 8 1 2 : E4-02 : E4-03 : E4-04 1 4 1 2 : E6-06 : E6-10 3 4 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (7) 3 8 3 4 1 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float type auto drain (AMR 100) (8) IS10-01 (0.4 MPa setting) Compact pressure switch 135510 135613 Elbow (R x Rc) (9) Note 5) in the gauge part number (e.g.

TM

(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

VHS

Applicable F.R.L Pressure relief 3 port valve Interface P/N Y20 VHS2500 AC2000 Y30 VHS3500 AC3000 AC4000 Y40 VHS4500 Spacer AC5000/5500/6000 Y60 VHS5500 Combination with "AC4000-06" not available. 3.6-17 Pressure Relief 3 Port Valve with a Locking Hole Series VH Construction Precautions VHS2500/3500/4500 VHS5500 r r t Be sure to read before handling.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.