SMC Electronic Switch Series Variations

trimmer 1 Pressure setting trimmer 2 SET2 SET2 SET1 SET1 15 15 Indicator light Indicator light 23 23 8.5 Lead wire length 600 Lead wire length 600 (3000) 9.5 1.5 (3000) 47.5 47.5 3.5 3.5 2-3.5 Mounting hole 2-3.5 Mounting hole 8.5 13 M5 X 0.8 M5 X 0.8 13 01: R(PT) 1/8 T1: NPTF 1/8 01: R(PT) 1/8 T1: NPTF 1/8 3.9-4 Quick response 10mS Easy and simple wiring Compact Pressure Switch Series ZSE2

I

Fitting SUS304 Pressure detection portion Diaphragm: SUS630 Lead Wire Special flexible polyvinyl chloride 6 three-core (red, black, white) 3000m Port Size 1/8 1/4 M5x0.8 M5x0.8 Mass Approx 220g PSE520 P O R T S I Z E 01 Rc(PT) 1/ 8 and M5x0.8 02 Rc(PT) 1/ 4 and M5x0.8 T01 NPTF 1/8 and M5x0.8 T02 NPTF 1/4 and M5x0.8 Based on 250C (80F) T E C H N I C A L SPECIFICATIONS CONNECTION ACCESSORIES

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-3-A10 VS7-3-B04 VS7-3-B06 3/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread

HRX-OM-X071

output signal 1 function RUN 1 D.OUT1 SEL 5.5.5 No.13 screen Contact output ignal 1 operation A A/B D.OUT1 TYPE No.14 screen Contact output signal 1 alarm AL.01 AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation

Rubber seal 5 Port Solenoid Valve Series SYJ5000

port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21 0.15 0.16 0.18 0.17

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally closed) 1 N.O. (Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

EXxx-OMU0020CN

Valve diagnostics 1 . 5-8 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01 1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 37 No.EX-OMU0020CN 5.1.2.3.

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

JXCx-OMT0005CN

-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1 5 + B-3 1 A-3 2 8 (14.2) 1 2 (2) B1 A1 17.7 1 (14) A6 B6 5 6 10.2 (3) 1 2 A1 B1 (18) 5.7 A3 B3 4 15 16 (11) 30.7 L 15.4 ()[820m] 1 2 LE CP B 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 4

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

HRX-OM-X084

. 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.3 Stop for a Long Time . 8-8 8.3.1 Discharge of the circulating fluid . 8-8 8.3.2 Discharge of the facility